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- W1984492011 abstract "A novel micro-electro-mechanical systems (MEMS) fabrication process is developed to create self-assembled on-chip high efficiency antennas. A self-assembly technique is used to create out-of-plane on-chip antennas with excellent radiation efficiency on low resistivity substrates. This paper discusses on the fabrication of a monopole antenna and the measurement of the antenna's radiation pattern characteristics. To achieve improved isolation and reduced loss, a thick dielectric layer was placed under the antennas and the transmission lines. The measurement shows maximum realized gain of −2.5 dBi at 66 GHz." @default.
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- W1984492011 date "2014-04-01" @default.
- W1984492011 modified "2023-09-27" @default.
- W1984492011 title "Polymer MEMS fabrication process for system-on-chip self-assembled millimeter-wave antennas" @default.
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- W1984492011 doi "https://doi.org/10.1109/dtip.2014.7056651" @default.
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