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- W1984500157 abstract "A strong resistivity increase in annealed nitrogen-doped silicon samples was reported long ago—but has remained not fully understood. It is now shown that the complicated evolution of the resistivity depth profiles observed can be reproduced by a simple model based on the out-diffusion of some relevant species. Two versions of such an approach were analyzed: (A) out-diffusion of deep donors treated as VN (off-centre substitutional nitrogen), (B) out-diffusion of vacancies (V) and interstitial trimers (N3) produced by dissociation of VN3. Version B, although more complicated, is attractive due to a coincidence of the deduced vacancy diffusivity DV at 1000 °C with the value extrapolated from low-temperature data by Watkins." @default.
- W1984500157 created "2016-06-24" @default.
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- W1984500157 date "2012-07-01" @default.
- W1984500157 modified "2023-09-25" @default.
- W1984500157 title "Out-diffusion of deep donors in nitrogen-doped silicon and the diffusivity of vacancies" @default.
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- W1984500157 doi "https://doi.org/10.1063/1.4731796" @default.
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