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- W1984503932 abstract "Abstract The penetration depth of x-rays into a crystal is one of the most important parameters in grazing incidence x-ray topography. In this paper, we introduce a novel method for controlling the penetration depth by modifying the polarization of incident x-rays with fixed sample geometry and x-ray wavelength. We employed an x-ray phase plate in transmission geometry for controlling the polarization, and obtained x-ray topographs of an ion-implanted 4H–SiC epitaxial wafer with σ- and π-polarized x-rays. By comparing the two topographs, it was verified that the penetration depth of σ-polarization is smaller than that of π-polarization." @default.
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- W1984503932 date "2013-11-01" @default.
- W1984503932 modified "2023-09-30" @default.
- W1984503932 title "Application of x-ray phase plate to grazing incidence x-ray topography for the control of penetration depth" @default.
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- W1984503932 doi "https://doi.org/10.1016/j.nima.2013.07.085" @default.
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