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- W1984595083 abstract "The research of influence of the thermodiffusion parameters -temperature gradient ∇<i>T</i> and heat of transport <i>Q</i>* on concentration profiles is carried out for diffusion from an instantaneous plane source and an extended source of infinite extent. The estimations of heats of transport of the P and B in silicon are made at nonisothermal annealing. The obtained results correspond to theoretical estimations and give meanings ofheat oftransport ~10<sup>3</sup> eV." @default.
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- W1984595083 date "2006-05-24" @default.
- W1984595083 modified "2023-09-25" @default.
- W1984595083 title "<title>Influence of thermodiffusion parameters on the concentration profiles</title>" @default.
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- W1984595083 doi "https://doi.org/10.1117/12.681764" @default.
- W1984595083 hasPublicationYear "2006" @default.
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