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• W1984671227 endingPage "360" @default.
• W1984671227 startingPage "349" @default.
• W1984671227 abstract "The radical was detected in the gas phase during the etching of both Si and substrates under reactive ion etching conditions in steady state and in the afterglow of pulsed plasmas, by laser-induced fluorescence (LIF). Spatially and temporally resolved measurements show that there is a major source of these radicals at, or very close to, the etched substrates, and that desorption of as one of the primary products is the most likely explanation. As the absolute concentration was not determined, it is not currently possible to say whether is a major etch product, although the observed signals were large. With an Si substrate, is produced both under steady-state RIE conditions (i.e. in the presence of ion bombardment) and in the afterglow of a pulsed discharge (i.e. by pure chemical etching by F atoms). In contrast, with an substrate, is only produced in the steady-state plasma. The net surface reaction probability of was found to be close to unity on the reactor walls. Some possible gas-phase reactions of are also discussed. The fluorescence lifetime of the excited state of was measured for the first time, giving a value of ns, in good agreement with theoretical estimates." @default.
• W1984671227 created "2016-06-24" @default.
• W1984671227 creator A5000189425 @default.
• W1984671227 creator A5046954629 @default.
• W1984671227 creator A5085305605 @default.
• W1984671227 date "1997-08-01" @default.
• W1984671227 modified "2023-09-25" @default.
• W1984671227 title "Laser-induced fluorescence detection of as a primary product of Si and reactive ion etching with gas" @default.
• W1984671227 cites W1971363695 @default.
• W1984671227 cites W1972840313 @default.
• W1984671227 cites W1973685322 @default.
• W1984671227 cites W1986160614 @default.
• W1984671227 cites W1995344598 @default.
• W1984671227 cites W1996055888 @default.
• W1984671227 cites W2006968912 @default.
• W1984671227 cites W2007824331 @default.
• W1984671227 cites W2010970391 @default.
• W1984671227 cites W2014658906 @default.
• W1984671227 cites W2021748168 @default.
• W1984671227 cites W2037296150 @default.
• W1984671227 cites W2041111539 @default.
• W1984671227 cites W2041802602 @default.
• W1984671227 cites W2043142272 @default.
• W1984671227 cites W2044405133 @default.
• W1984671227 cites W2044820852 @default.
• W1984671227 cites W2049887443 @default.
• W1984671227 cites W2051804487 @default.
• W1984671227 cites W2053569892 @default.
• W1984671227 cites W2064969081 @default.
• W1984671227 cites W2067749388 @default.
• W1984671227 cites W2072544063 @default.
• W1984671227 cites W2082778446 @default.
• W1984671227 cites W2082851549 @default.
• W1984671227 cites W2083646779 @default.
• W1984671227 cites W2087988050 @default.
• W1984671227 cites W2088374614 @default.
• W1984671227 cites W2088430905 @default.
• W1984671227 cites W2091934158 @default.
• W1984671227 cites W2110200822 @default.
• W1984671227 cites W2125527970 @default.
• W1984671227 cites W2125740604 @default.
• W1984671227 cites W2335326221 @default.
• W1984671227 cites W2019200748 @default.
• W1984671227 doi "https://doi.org/10.1088/0963-0252/6/3/012" @default.
• W1984671227 hasPublicationYear "1997" @default.
• W1984671227 type Work @default.
• W1984671227 sameAs 1984671227 @default.
• W1984671227 citedByCount "50" @default.
• W1984671227 countsByYear W19846712272012 @default.
• W1984671227 countsByYear W19846712272015 @default.
• W1984671227 countsByYear W19846712272016 @default.
• W1984671227 countsByYear W19846712272017 @default.
• W1984671227 countsByYear W19846712272020 @default.
• W1984671227 countsByYear W19846712272022 @default.
• W1984671227 crossrefType "journal-article" @default.
• W1984671227 hasAuthorship W1984671227A5000189425 @default.
• W1984671227 hasAuthorship W1984671227A5046954629 @default.
• W1984671227 hasAuthorship W1984671227A5085305605 @default.
• W1984671227 hasConcept C100460472 @default.
• W1984671227 hasConcept C111368507 @default.
• W1984671227 hasConcept C113196181 @default.
• W1984671227 hasConcept C120665830 @default.
• W1984671227 hasConcept C121332964 @default.
• W1984671227 hasConcept C127313418 @default.
• W1984671227 hasConcept C1276947 @default.
• W1984671227 hasConcept C130472188 @default.
• W1984671227 hasConcept C1342733 @default.
• W1984671227 hasConcept C145148216 @default.
• W1984671227 hasConcept C17599544 @default.
• W1984671227 hasConcept C178790620 @default.
• W1984671227 hasConcept C181500209 @default.
• W1984671227 hasConcept C184779094 @default.
• W1984671227 hasConcept C185592680 @default.
• W1984671227 hasConcept C2777036043 @default.
• W1984671227 hasConcept C2777289219 @default.
• W1984671227 hasConcept C2779227376 @default.
• W1984671227 hasConcept C33220542 @default.
• W1984671227 hasConcept C43617362 @default.
• W1984671227 hasConcept C62520636 @default.
• W1984671227 hasConcept C75473681 @default.
• W1984671227 hasConcept C82706917 @default.
• W1984671227 hasConcept C91881484 @default.
• W1984671227 hasConceptScore W1984671227C100460472 @default.
• W1984671227 hasConceptScore W1984671227C111368507 @default.
• W1984671227 hasConceptScore W1984671227C113196181 @default.
• W1984671227 hasConceptScore W1984671227C120665830 @default.
• W1984671227 hasConceptScore W1984671227C121332964 @default.
• W1984671227 hasConceptScore W1984671227C127313418 @default.
• W1984671227 hasConceptScore W1984671227C1276947 @default.
• W1984671227 hasConceptScore W1984671227C130472188 @default.
• W1984671227 hasConceptScore W1984671227C1342733 @default.
• W1984671227 hasConceptScore W1984671227C145148216 @default.
• W1984671227 hasConceptScore W1984671227C17599544 @default.
• W1984671227 hasConceptScore W1984671227C178790620 @default.
• W1984671227 hasConceptScore W1984671227C181500209 @default.
• W1984671227 hasConceptScore W1984671227C184779094 @default.
• W1984671227 hasConceptScore W1984671227C185592680 @default.
• W1984671227 hasConceptScore W1984671227C2777036043 @default.

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