Matches in SemOpenAlex for { <https://semopenalex.org/work/W1984690147> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W1984690147 endingPage "H134" @default.
- W1984690147 startingPage "H134" @default.
- W1984690147 abstract "Si wafers were electrochemically grooved in HF solution using metal wires (Pt and Au wires) as catalytic wire electrodes and a Pt plate as a counter electrode. By applying anodic potentials of about vs to the Pt or Au wire electrodes, which were in contact with Si, Si was etched at the place where the wires were in contact. As a result, grooves were formed in Si. The widths of the grooves formed using Pt wires with diameters of 30 and were about 35 and , respectively. The grooving rate was typically in the range of at room temperature. The grooving rate was faster for the thinner wire electrodes because the diffusion of chemical species to and from the interface became easier for the thinner electrodes. The grooving rate was increased by increasing the anodic potential or temperature, although the Si surface was roughened to some extent under such conditions." @default.
- W1984690147 created "2016-06-24" @default.
- W1984690147 creator A5016273973 @default.
- W1984690147 creator A5019053301 @default.
- W1984690147 creator A5035564134 @default.
- W1984690147 creator A5058051197 @default.
- W1984690147 creator A5065210919 @default.
- W1984690147 date "2009-01-01" @default.
- W1984690147 modified "2023-09-25" @default.
- W1984690147 title "Electrochemical Grooving of Si Wafers Using Catalytic Wire Electrodes in HF Solution" @default.
- W1984690147 cites W2005528117 @default.
- W1984690147 cites W2013422243 @default.
- W1984690147 cites W2015488136 @default.
- W1984690147 cites W2034364733 @default.
- W1984690147 cites W2036458080 @default.
- W1984690147 cites W2051350433 @default.
- W1984690147 cites W2052578782 @default.
- W1984690147 cites W2070631183 @default.
- W1984690147 cites W2079389741 @default.
- W1984690147 cites W2092687633 @default.
- W1984690147 cites W2496933069 @default.
- W1984690147 doi "https://doi.org/10.1149/1.3033735" @default.
- W1984690147 hasPublicationYear "2009" @default.
- W1984690147 type Work @default.
- W1984690147 sameAs 1984690147 @default.
- W1984690147 citedByCount "18" @default.
- W1984690147 countsByYear W19846901472012 @default.
- W1984690147 countsByYear W19846901472013 @default.
- W1984690147 countsByYear W19846901472015 @default.
- W1984690147 countsByYear W19846901472016 @default.
- W1984690147 countsByYear W19846901472017 @default.
- W1984690147 countsByYear W19846901472019 @default.
- W1984690147 countsByYear W19846901472020 @default.
- W1984690147 countsByYear W19846901472023 @default.
- W1984690147 crossrefType "journal-article" @default.
- W1984690147 hasAuthorship W1984690147A5016273973 @default.
- W1984690147 hasAuthorship W1984690147A5019053301 @default.
- W1984690147 hasAuthorship W1984690147A5035564134 @default.
- W1984690147 hasAuthorship W1984690147A5058051197 @default.
- W1984690147 hasAuthorship W1984690147A5065210919 @default.
- W1984690147 hasConcept C121332964 @default.
- W1984690147 hasConcept C147789679 @default.
- W1984690147 hasConcept C159985019 @default.
- W1984690147 hasConcept C160671074 @default.
- W1984690147 hasConcept C161790260 @default.
- W1984690147 hasConcept C17525397 @default.
- W1984690147 hasConcept C185592680 @default.
- W1984690147 hasConcept C191897082 @default.
- W1984690147 hasConcept C192562407 @default.
- W1984690147 hasConcept C49040817 @default.
- W1984690147 hasConcept C52859227 @default.
- W1984690147 hasConcept C544153396 @default.
- W1984690147 hasConcept C55493867 @default.
- W1984690147 hasConcept C69357855 @default.
- W1984690147 hasConcept C89395315 @default.
- W1984690147 hasConcept C97355855 @default.
- W1984690147 hasConceptScore W1984690147C121332964 @default.
- W1984690147 hasConceptScore W1984690147C147789679 @default.
- W1984690147 hasConceptScore W1984690147C159985019 @default.
- W1984690147 hasConceptScore W1984690147C160671074 @default.
- W1984690147 hasConceptScore W1984690147C161790260 @default.
- W1984690147 hasConceptScore W1984690147C17525397 @default.
- W1984690147 hasConceptScore W1984690147C185592680 @default.
- W1984690147 hasConceptScore W1984690147C191897082 @default.
- W1984690147 hasConceptScore W1984690147C192562407 @default.
- W1984690147 hasConceptScore W1984690147C49040817 @default.
- W1984690147 hasConceptScore W1984690147C52859227 @default.
- W1984690147 hasConceptScore W1984690147C544153396 @default.
- W1984690147 hasConceptScore W1984690147C55493867 @default.
- W1984690147 hasConceptScore W1984690147C69357855 @default.
- W1984690147 hasConceptScore W1984690147C89395315 @default.
- W1984690147 hasConceptScore W1984690147C97355855 @default.
- W1984690147 hasIssue "2" @default.
- W1984690147 hasLocation W19846901471 @default.
- W1984690147 hasOpenAccess W1984690147 @default.
- W1984690147 hasPrimaryLocation W19846901471 @default.
- W1984690147 hasRelatedWork W2086113329 @default.
- W1984690147 hasRelatedWork W2096537931 @default.
- W1984690147 hasRelatedWork W2102805243 @default.
- W1984690147 hasRelatedWork W2138121978 @default.
- W1984690147 hasRelatedWork W2353830756 @default.
- W1984690147 hasRelatedWork W2970257785 @default.
- W1984690147 hasRelatedWork W3195991992 @default.
- W1984690147 hasRelatedWork W4225165425 @default.
- W1984690147 hasRelatedWork W4296060298 @default.
- W1984690147 hasRelatedWork W4310573114 @default.
- W1984690147 hasVolume "156" @default.
- W1984690147 isParatext "false" @default.
- W1984690147 isRetracted "false" @default.
- W1984690147 magId "1984690147" @default.
- W1984690147 workType "article" @default.