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- W1984782763 abstract "Damage accumulation and annihilation processes with low-energy boron implantation were studied by molecular dynamics (MD) simulation. The MD simulation of B atom accelerated with 500eV iteratively implanted into Si(100) target showed that the number of interstitial Si atom saturates at about 1×1015/cm2 of B atomic dose. The results at several implant doses are annealed for about 4ns. When the B implanted dose is as low as 1× or 2×1014/cm2, the annealing simulations showed the re-crystallization of surface damage at 1800K and 2200K. However, very slow re-crystallization ratio was observed at the implant dose of more than 1×1015/cm2." @default.
- W1984782763 created "2016-06-24" @default.
- W1984782763 creator A5018101394 @default.
- W1984782763 creator A5020399656 @default.
- W1984782763 date "2009-06-01" @default.
- W1984782763 modified "2023-09-25" @default.
- W1984782763 title "Study of damage accumulation and annealing process at low energy boron implantation using molecular dynamics simulations" @default.
- W1984782763 cites W2088759658 @default.
- W1984782763 doi "https://doi.org/10.1109/iwjt.2009.5166237" @default.
- W1984782763 hasPublicationYear "2009" @default.
- W1984782763 type Work @default.
- W1984782763 sameAs 1984782763 @default.
- W1984782763 citedByCount "0" @default.
- W1984782763 crossrefType "proceedings-article" @default.
- W1984782763 hasAuthorship W1984782763A5018101394 @default.
- W1984782763 hasAuthorship W1984782763A5020399656 @default.
- W1984782763 hasConcept C113196181 @default.
- W1984782763 hasConcept C121332964 @default.
- W1984782763 hasConcept C127413603 @default.
- W1984782763 hasConcept C145148216 @default.
- W1984782763 hasConcept C147597530 @default.
- W1984782763 hasConcept C149635348 @default.
- W1984782763 hasConcept C159985019 @default.
- W1984782763 hasConcept C178790620 @default.
- W1984782763 hasConcept C185544564 @default.
- W1984782763 hasConcept C185592680 @default.
- W1984782763 hasConcept C192562407 @default.
- W1984782763 hasConcept C201941533 @default.
- W1984782763 hasConcept C203036418 @default.
- W1984782763 hasConcept C2777855556 @default.
- W1984782763 hasConcept C41008148 @default.
- W1984782763 hasConcept C41823505 @default.
- W1984782763 hasConcept C41999313 @default.
- W1984782763 hasConcept C42360764 @default.
- W1984782763 hasConcept C43617362 @default.
- W1984782763 hasConcept C501308230 @default.
- W1984782763 hasConcept C58312451 @default.
- W1984782763 hasConcept C59593255 @default.
- W1984782763 hasConceptScore W1984782763C113196181 @default.
- W1984782763 hasConceptScore W1984782763C121332964 @default.
- W1984782763 hasConceptScore W1984782763C127413603 @default.
- W1984782763 hasConceptScore W1984782763C145148216 @default.
- W1984782763 hasConceptScore W1984782763C147597530 @default.
- W1984782763 hasConceptScore W1984782763C149635348 @default.
- W1984782763 hasConceptScore W1984782763C159985019 @default.
- W1984782763 hasConceptScore W1984782763C178790620 @default.
- W1984782763 hasConceptScore W1984782763C185544564 @default.
- W1984782763 hasConceptScore W1984782763C185592680 @default.
- W1984782763 hasConceptScore W1984782763C192562407 @default.
- W1984782763 hasConceptScore W1984782763C201941533 @default.
- W1984782763 hasConceptScore W1984782763C203036418 @default.
- W1984782763 hasConceptScore W1984782763C2777855556 @default.
- W1984782763 hasConceptScore W1984782763C41008148 @default.
- W1984782763 hasConceptScore W1984782763C41823505 @default.
- W1984782763 hasConceptScore W1984782763C41999313 @default.
- W1984782763 hasConceptScore W1984782763C42360764 @default.
- W1984782763 hasConceptScore W1984782763C43617362 @default.
- W1984782763 hasConceptScore W1984782763C501308230 @default.
- W1984782763 hasConceptScore W1984782763C58312451 @default.
- W1984782763 hasConceptScore W1984782763C59593255 @default.
- W1984782763 hasLocation W19847827631 @default.
- W1984782763 hasOpenAccess W1984782763 @default.
- W1984782763 hasPrimaryLocation W19847827631 @default.
- W1984782763 hasRelatedWork W12929244 @default.
- W1984782763 hasRelatedWork W1578048106 @default.
- W1984782763 hasRelatedWork W1989564944 @default.
- W1984782763 hasRelatedWork W1993187210 @default.
- W1984782763 hasRelatedWork W2003537995 @default.
- W1984782763 hasRelatedWork W2010477482 @default.
- W1984782763 hasRelatedWork W2013493318 @default.
- W1984782763 hasRelatedWork W2035934669 @default.
- W1984782763 hasRelatedWork W2061795059 @default.
- W1984782763 hasRelatedWork W2087811468 @default.
- W1984782763 hasRelatedWork W2106195805 @default.
- W1984782763 hasRelatedWork W2108556380 @default.
- W1984782763 hasRelatedWork W2109522398 @default.
- W1984782763 hasRelatedWork W2158540419 @default.
- W1984782763 hasRelatedWork W2162445695 @default.
- W1984782763 hasRelatedWork W2297005758 @default.
- W1984782763 hasRelatedWork W2300976286 @default.
- W1984782763 hasRelatedWork W2533803856 @default.
- W1984782763 hasRelatedWork W2548483339 @default.
- W1984782763 hasRelatedWork W98065360 @default.
- W1984782763 isParatext "false" @default.
- W1984782763 isRetracted "false" @default.
- W1984782763 magId "1984782763" @default.
- W1984782763 workType "article" @default.