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- W1984936876 abstract "The direct current (dc) glow discharge plasma parameters and active species kinetics in HCl-X (X = Ar, N<sub>2</sub>, H<sub>2</sub>, Cl<sub>2</sub>, O<sub>2</sub>) mixtures were studied using both plasma diagnostics Langmuir probes and modeling. The 0-dimensional self-consistent steady-state model included the simultaneous solution of Boltzmann kinetic equation, the equations of chemical kinetics for neutral and charge particles, plasma conductivity equation and the quasi-neutrality conditions for volume densities of charged particles as well as for their fluxes to the reactor walls. The data on the steady-state electron energy distribution function, electron gas characteristics (mean energy, drift rate and transport coefficients), volume-averaged densities of plasma active species and their fluxed to the reactor walls were obtained as functions of gas mixing ratios and gas pressure at fixed discharge current." @default.
- W1984936876 created "2016-06-24" @default.
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- W1984936876 date "2013-01-08" @default.
- W1984936876 modified "2023-09-27" @default.
- W1984936876 title "The effects of additive gases (Ar, N2, H2, Cl2, O2) on HCl plasma parameters and composition" @default.
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- W1984936876 doi "https://doi.org/10.1117/12.2017138" @default.
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