Matches in SemOpenAlex for { <https://semopenalex.org/work/W1984954213> ?p ?o ?g. }
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- W1984954213 endingPage "148" @default.
- W1984954213 startingPage "146" @default.
- W1984954213 abstract "Al2O3 films were deposited on Ge substrates by reactive sputtering. Resulting samples were submitted to different post-deposition annealings (PDAs) in order to probe composition modifications induced by such treatments. Nuclear reaction profiling (NRP) revealed that O incorporation depends on PDA temperature and on the employed atmosphere (water or oxygen). We also found that O from the gas phase strongly interacts with the Ge semiconductor substrate when PDA is performed with water at 500 °C. Ion scattering analyses evidenced an increase of Ge concentration throughout the Al2O3 dielectric layer and on the sample surface associated with the oxidation of the Ge substrate. These findings are explained by GeO desorption resulting from chemical reactions occurring at the dielectric/Ge interface." @default.
- W1984954213 created "2016-06-24" @default.
- W1984954213 creator A5001623564 @default.
- W1984954213 creator A5027776958 @default.
- W1984954213 creator A5046943648 @default.
- W1984954213 creator A5060056598 @default.
- W1984954213 creator A5090140586 @default.
- W1984954213 date "2012-02-01" @default.
- W1984954213 modified "2023-10-14" @default.
- W1984954213 title "Probing the stability of Al2O3/Ge structures with ion beams" @default.
- W1984954213 cites W1952951874 @default.
- W1984954213 cites W1969261628 @default.
- W1984954213 cites W1997380413 @default.
- W1984954213 cites W2007386293 @default.
- W1984954213 cites W2024140965 @default.
- W1984954213 cites W2053462627 @default.
- W1984954213 cites W2092291004 @default.
- W1984954213 cites W2117990380 @default.
- W1984954213 doi "https://doi.org/10.1016/j.nimb.2011.07.061" @default.
- W1984954213 hasPublicationYear "2012" @default.
- W1984954213 type Work @default.
- W1984954213 sameAs 1984954213 @default.
- W1984954213 citedByCount "3" @default.
- W1984954213 countsByYear W19849542132012 @default.
- W1984954213 countsByYear W19849542132014 @default.
- W1984954213 countsByYear W19849542132021 @default.
- W1984954213 crossrefType "journal-article" @default.
- W1984954213 hasAuthorship W1984954213A5001623564 @default.
- W1984954213 hasAuthorship W1984954213A5027776958 @default.
- W1984954213 hasAuthorship W1984954213A5046943648 @default.
- W1984954213 hasAuthorship W1984954213A5060056598 @default.
- W1984954213 hasAuthorship W1984954213A5090140586 @default.
- W1984954213 hasConcept C107872376 @default.
- W1984954213 hasConcept C108225325 @default.
- W1984954213 hasConcept C111368507 @default.
- W1984954213 hasConcept C113196181 @default.
- W1984954213 hasConcept C127313418 @default.
- W1984954213 hasConcept C133386390 @default.
- W1984954213 hasConcept C145148216 @default.
- W1984954213 hasConcept C147789679 @default.
- W1984954213 hasConcept C150394285 @default.
- W1984954213 hasConcept C162711632 @default.
- W1984954213 hasConcept C171250308 @default.
- W1984954213 hasConcept C178790620 @default.
- W1984954213 hasConcept C185592680 @default.
- W1984954213 hasConcept C19067145 @default.
- W1984954213 hasConcept C192562407 @default.
- W1984954213 hasConcept C22423302 @default.
- W1984954213 hasConcept C2777289219 @default.
- W1984954213 hasConcept C49040817 @default.
- W1984954213 hasConcept C540031477 @default.
- W1984954213 hasConceptScore W1984954213C107872376 @default.
- W1984954213 hasConceptScore W1984954213C108225325 @default.
- W1984954213 hasConceptScore W1984954213C111368507 @default.
- W1984954213 hasConceptScore W1984954213C113196181 @default.
- W1984954213 hasConceptScore W1984954213C127313418 @default.
- W1984954213 hasConceptScore W1984954213C133386390 @default.
- W1984954213 hasConceptScore W1984954213C145148216 @default.
- W1984954213 hasConceptScore W1984954213C147789679 @default.
- W1984954213 hasConceptScore W1984954213C150394285 @default.
- W1984954213 hasConceptScore W1984954213C162711632 @default.
- W1984954213 hasConceptScore W1984954213C171250308 @default.
- W1984954213 hasConceptScore W1984954213C178790620 @default.
- W1984954213 hasConceptScore W1984954213C185592680 @default.
- W1984954213 hasConceptScore W1984954213C19067145 @default.
- W1984954213 hasConceptScore W1984954213C192562407 @default.
- W1984954213 hasConceptScore W1984954213C22423302 @default.
- W1984954213 hasConceptScore W1984954213C2777289219 @default.
- W1984954213 hasConceptScore W1984954213C49040817 @default.
- W1984954213 hasConceptScore W1984954213C540031477 @default.
- W1984954213 hasLocation W19849542131 @default.
- W1984954213 hasOpenAccess W1984954213 @default.
- W1984954213 hasPrimaryLocation W19849542131 @default.
- W1984954213 hasRelatedWork W1994948238 @default.
- W1984954213 hasRelatedWork W2041689571 @default.
- W1984954213 hasRelatedWork W2053761975 @default.
- W1984954213 hasRelatedWork W2060228644 @default.
- W1984954213 hasRelatedWork W2085188748 @default.
- W1984954213 hasRelatedWork W2127122172 @default.
- W1984954213 hasRelatedWork W2316948141 @default.
- W1984954213 hasRelatedWork W2332697257 @default.
- W1984954213 hasRelatedWork W2907400246 @default.
- W1984954213 hasRelatedWork W786316333 @default.
- W1984954213 hasVolume "273" @default.
- W1984954213 isParatext "false" @default.
- W1984954213 isRetracted "false" @default.
- W1984954213 magId "1984954213" @default.
- W1984954213 workType "article" @default.