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• W1985053901 abstract "The applicability of MOEMS scanning mirrors towards the creation of flying spot scanned laser displays is wellestablished. The extension of this concept towards compact embedded pico-projectors has required an evolution ofscanners and packaging to accommodate the needs of the consumer electronics space. This paper describes theprogression of the biaxial MOEMS scanning mirrors developed by Microvision over recent years. Various aspects of theindividual designs are compared. Early devices used a combination of magnetic quasistatic actuation and resonantelectrostatic operation in an evacuated atmosphere to create a projection engine for retinal scanned displays. Subsequentdesigns realized the elimination of both the high voltage electrostatic drive and the vacuum package, and a simplificationof the actuation scheme through proprietary technical advances. Additional advances have doubled the scan anglecapability and greatly miniaturized the MOEMS component while not incurring significant increase in powerconsumption, making it an excellent fit for the consumer pico-projector application.The simplicity of the scanned laser-based pico-projector optical design enables high resolution and a large effectiveimage size in a thin projection engine, all of which become critical both to the viability of the technology and adoptionby consumers. Microvision's first scanned laser pico-projector is built around a MOEMS scanning mirror capable ofprojecting 16:9 aspect ratio, WVGA display within a 6.6 mm high package. Further evolution on this path promisescontinued improvement in resolution, size, and power." @default.
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• W1985053901 date "2010-02-11" @default.
• W1985053901 modified "2023-09-26" @default.
• W1985053901 title "Evolution of MEMS scanning mirrors for laser projection in compact consumer electronics" @default.
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• W1985053901 doi "https://doi.org/10.1117/12.843095" @default.
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