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- W1985085510 abstract "In VLSI development, many experiments are required to determine the process flow and the process specifications for wafer treatment. Therefore, the kinds of experiments have become tremendous for the development. Since the process specifications are often different from wafer to wafer, the management of many sort and small quantity lots is essential. In this paper, a distributed wafer tracking system for VLSI development is described. This distributed computer system is constituted of personal computers and a host computer. A new method was developed and adopted in which the process specifications are pre-registered on 3.5 inch floppy discs as well as a new data management architecture. This system realizes higher reliability and flexibility using simple hard/software construction and flexibility than the conventional centralized system." @default.
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- W1985085510 date "1988-01-01" @default.
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- W1985085510 title "Computer-aided processing system (CAPS) for vlsi development" @default.
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- W1985085510 doi "https://doi.org/10.1002/ecjb.4420710502" @default.
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