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- W1985173861 abstract "Grating interferometry that features long range and nanometer resolution is presented. The optical system was established based on a single long metrology grating. The large fringe multiplication was achieved by properly selecting two high-order diffraction beams to form a fringe pattern. The fringe pattern collected by a linear array was first tailored to a few multiples of fringes in order to suppress the effect of the energy leakage on phase-extracting precision when the fast Fourier transform (FFT) algorithm was used to calculate its phase. Thus, the phase-extracting precision of a tailored fringe pattern by FFT was greatly improved. Based on this, a novel subdividing method, which exploited the time-shift property of FFT, was developed to subdivide the fringe with large multiple and high accuracy. Numerical results show that the system resolution reaches 1 nm. The experimental results obtained against a capacitive sensor in the sub-mm range show that the measurement precision of the system is less than 10 nm." @default.
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- W1985173861 date "2007-11-23" @default.
- W1985173861 modified "2023-09-28" @default.
- W1985173861 title "Research on long-range grating interferometry with nanometer resolution" @default.
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