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• W1985231831 abstract "Scatterometry is a well established technique currently utilized in research, as well as in industrial applications, to retrieve the properties of a given scatterer (the target) by looking at how the light coming from a certain source is diffracted in the far field. Currently the light source is often a discharge lamp that, after wavelength filtering, can be thought as a quasi-monochromatic, but spatially incoherent, source. In the present work, benefits of using a focused spot from a spatially coherent light source, as that emitted by a laser, are investigated on a theoretical viewpoint. The focused spot is scanned over the object of interest and, for each scan position, a far-field diffraction pattern is recorded. Our results show that spatially coherent light can sensibly increase the accuracy of the technique with respect to the target’s geometrical profile." @default.
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• W1985231831 date "2011-11-12" @default.
• W1985231831 modified "2023-10-01" @default.
• W1985231831 title "Performance analysis of coherent optical scatterometry" @default.
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• W1985231831 doi "https://doi.org/10.1007/s00340-011-4794-7" @default.
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