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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1985318936> ?p ?o ?g. }

• W1985318936 endingPage "128" @default.
• W1985318936 startingPage "102" @default.
• W1985318936 abstract "The present review intends to help its reader find a suitable method for temperature measurement in Millisecond Spike Annealing (MSA). For this purpose it is going to highlight current and former industrial and research approaches for both RTP (Rapid Thermal Processing) and MSA to measure the “true wafer temperature.” The theoretical background of each measurement technique is considered along with its capability to be applied in MSA tools as well as its suitability for industry in terms of time and temperature resolution." @default.
• W1985318936 created "2016-06-24" @default.
• W1985318936 creator A5011400560 @default.
• W1985318936 creator A5031188159 @default.
• W1985318936 creator A5061659102 @default.
• W1985318936 creator A5069846742 @default.
• W1985318936 date "2011-04-01" @default.
• W1985318936 modified "2023-09-27" @default.
• W1985318936 title "Temperature Measurement in Rapid Thermal Processing with Focus on the Application to Flash Lamp Annealing" @default.
• W1985318936 cites W1976818861 @default.
• W1985318936 cites W1984921619 @default.
• W1985318936 cites W1989788844 @default.
• W1985318936 cites W1995823436 @default.
• W1985318936 cites W1999977781 @default.
• W1985318936 cites W2005808921 @default.
• W1985318936 cites W2014689319 @default.
• W1985318936 cites W2038695380 @default.
• W1985318936 cites W2042128420 @default.
• W1985318936 cites W2047580551 @default.
• W1985318936 cites W2055328165 @default.
• W1985318936 cites W2058356451 @default.
• W1985318936 cites W2074011835 @default.
• W1985318936 cites W2084655856 @default.
• W1985318936 cites W2096797445 @default.
• W1985318936 cites W2127230039 @default.
• W1985318936 cites W2131756766 @default.
• W1985318936 cites W2139678580 @default.
• W1985318936 cites W2491197203 @default.
• W1985318936 cites W2020679464 @default.
• W1985318936 doi "https://doi.org/10.1080/10408436.2011.572757" @default.
• W1985318936 hasPublicationYear "2011" @default.
• W1985318936 type Work @default.
• W1985318936 sameAs 1985318936 @default.
• W1985318936 citedByCount "15" @default.
• W1985318936 countsByYear W19853189362014 @default.
• W1985318936 countsByYear W19853189362016 @default.
• W1985318936 countsByYear W19853189362017 @default.
• W1985318936 countsByYear W19853189362018 @default.
• W1985318936 countsByYear W19853189362019 @default.
• W1985318936 countsByYear W19853189362022 @default.
• W1985318936 countsByYear W19853189362023 @default.
• W1985318936 crossrefType "journal-article" @default.
• W1985318936 hasAuthorship W1985318936A5011400560 @default.
• W1985318936 hasAuthorship W1985318936A5031188159 @default.
• W1985318936 hasAuthorship W1985318936A5061659102 @default.
• W1985318936 hasAuthorship W1985318936A5069846742 @default.
• W1985318936 hasConcept C116915560 @default.
• W1985318936 hasConcept C121332964 @default.
• W1985318936 hasConcept C124101348 @default.
• W1985318936 hasConcept C127413603 @default.
• W1985318936 hasConcept C1276947 @default.
• W1985318936 hasConcept C159985019 @default.
• W1985318936 hasConcept C160671074 @default.
• W1985318936 hasConcept C171250308 @default.
• W1985318936 hasConcept C192562407 @default.
• W1985318936 hasConcept C204530211 @default.
• W1985318936 hasConcept C21880701 @default.
• W1985318936 hasConcept C24326235 @default.
• W1985318936 hasConcept C2777472991 @default.
• W1985318936 hasConcept C2777855556 @default.
• W1985318936 hasConcept C2780009758 @default.
• W1985318936 hasConcept C41008148 @default.
• W1985318936 hasConcept C49040817 @default.
• W1985318936 hasConcept C60327585 @default.
• W1985318936 hasConcept C61696701 @default.
• W1985318936 hasConcept C72293138 @default.
• W1985318936 hasConcept C72832162 @default.
• W1985318936 hasConcept C97355855 @default.
• W1985318936 hasConceptScore W1985318936C116915560 @default.
• W1985318936 hasConceptScore W1985318936C121332964 @default.
• W1985318936 hasConceptScore W1985318936C124101348 @default.
• W1985318936 hasConceptScore W1985318936C127413603 @default.
• W1985318936 hasConceptScore W1985318936C1276947 @default.
• W1985318936 hasConceptScore W1985318936C159985019 @default.
• W1985318936 hasConceptScore W1985318936C160671074 @default.
• W1985318936 hasConceptScore W1985318936C171250308 @default.
• W1985318936 hasConceptScore W1985318936C192562407 @default.
• W1985318936 hasConceptScore W1985318936C204530211 @default.
• W1985318936 hasConceptScore W1985318936C21880701 @default.
• W1985318936 hasConceptScore W1985318936C24326235 @default.
• W1985318936 hasConceptScore W1985318936C2777472991 @default.
• W1985318936 hasConceptScore W1985318936C2777855556 @default.
• W1985318936 hasConceptScore W1985318936C2780009758 @default.
• W1985318936 hasConceptScore W1985318936C41008148 @default.
• W1985318936 hasConceptScore W1985318936C49040817 @default.
• W1985318936 hasConceptScore W1985318936C60327585 @default.
• W1985318936 hasConceptScore W1985318936C61696701 @default.
• W1985318936 hasConceptScore W1985318936C72293138 @default.
• W1985318936 hasConceptScore W1985318936C72832162 @default.
• W1985318936 hasConceptScore W1985318936C97355855 @default.
• W1985318936 hasIssue "2" @default.
• W1985318936 hasLocation W19853189361 @default.
• W1985318936 hasOpenAccess W1985318936 @default.
• W1985318936 hasPrimaryLocation W19853189361 @default.
• W1985318936 hasRelatedWork W100488350 @default.
• W1985318936 hasRelatedWork W145316617 @default.
• W1985318936 hasRelatedWork W1969601931 @default.
• W1985318936 hasRelatedWork W1985318936 @default.

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