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- W1985451211 endingPage "109" @default.
- W1985451211 startingPage "97" @default.
- W1985451211 abstract "As a novel Si-precursor in chemical vapor deposition epitaxial growth of 4H-SiC, tetrafluorosilane (TFS) is studied for both its advantages and disadvantages. Due to its high Si-F binding energy, TFS presents exceptional ability in the suppression of parasitic deposition and Si-droplet formation during SiC epitaxial growth. As compared with epigrowth using a chlorinated precursor, dichlorosilane (DCS), growth using TFS shows a lower growth rate most likely due to the TFS etching of SiC during growth and the lower reactivity of TFS, but the quality of the TFS grown epilayers is always superior. Epigrowth using TFS also shows better control of the uniformities of epilayer surface morphology and doping concentration, which offers excellent uniformity of SiC device performance. The influence of growth conditions including temperature, gas flow rate, Si/H 2 ratio, and C/Si ratio on growth rate and epilayer properties is investigated in growth using TFS and compared with growth using DCS." @default.
- W1985451211 created "2016-06-24" @default.
- W1985451211 creator A5010528216 @default.
- W1985451211 creator A5040003987 @default.
- W1985451211 creator A5049667391 @default.
- W1985451211 creator A5085410051 @default.
- W1985451211 creator A5085787693 @default.
- W1985451211 date "2013-08-31" @default.
- W1985451211 modified "2023-09-27" @default.
- W1985451211 title "Comparison of SiC Epitaxial Growth from Dichlorosilane and Tetrafluorosilane Precursors" @default.
- W1985451211 doi "https://doi.org/10.1149/05804.0097ecst" @default.
- W1985451211 hasPublicationYear "2013" @default.
- W1985451211 type Work @default.
- W1985451211 sameAs 1985451211 @default.
- W1985451211 citedByCount "4" @default.
- W1985451211 countsByYear W19854512112014 @default.
- W1985451211 countsByYear W19854512112016 @default.
- W1985451211 crossrefType "journal-article" @default.
- W1985451211 hasAuthorship W1985451211A5010528216 @default.
- W1985451211 hasAuthorship W1985451211A5040003987 @default.
- W1985451211 hasAuthorship W1985451211A5049667391 @default.
- W1985451211 hasAuthorship W1985451211A5085410051 @default.
- W1985451211 hasAuthorship W1985451211A5085787693 @default.
- W1985451211 hasConcept C100460472 @default.
- W1985451211 hasConcept C110738630 @default.
- W1985451211 hasConcept C121332964 @default.
- W1985451211 hasConcept C127413603 @default.
- W1985451211 hasConcept C151730666 @default.
- W1985451211 hasConcept C171250308 @default.
- W1985451211 hasConcept C172120300 @default.
- W1985451211 hasConcept C192562407 @default.
- W1985451211 hasConcept C2524010 @default.
- W1985451211 hasConcept C2778312390 @default.
- W1985451211 hasConcept C2779227376 @default.
- W1985451211 hasConcept C2779523567 @default.
- W1985451211 hasConcept C2816523 @default.
- W1985451211 hasConcept C33923547 @default.
- W1985451211 hasConcept C42360764 @default.
- W1985451211 hasConcept C49040817 @default.
- W1985451211 hasConcept C544956773 @default.
- W1985451211 hasConcept C57410435 @default.
- W1985451211 hasConcept C62520636 @default.
- W1985451211 hasConcept C64297162 @default.
- W1985451211 hasConcept C86803240 @default.
- W1985451211 hasConceptScore W1985451211C100460472 @default.
- W1985451211 hasConceptScore W1985451211C110738630 @default.
- W1985451211 hasConceptScore W1985451211C121332964 @default.
- W1985451211 hasConceptScore W1985451211C127413603 @default.
- W1985451211 hasConceptScore W1985451211C151730666 @default.
- W1985451211 hasConceptScore W1985451211C171250308 @default.
- W1985451211 hasConceptScore W1985451211C172120300 @default.
- W1985451211 hasConceptScore W1985451211C192562407 @default.
- W1985451211 hasConceptScore W1985451211C2524010 @default.
- W1985451211 hasConceptScore W1985451211C2778312390 @default.
- W1985451211 hasConceptScore W1985451211C2779227376 @default.
- W1985451211 hasConceptScore W1985451211C2779523567 @default.
- W1985451211 hasConceptScore W1985451211C2816523 @default.
- W1985451211 hasConceptScore W1985451211C33923547 @default.
- W1985451211 hasConceptScore W1985451211C42360764 @default.
- W1985451211 hasConceptScore W1985451211C49040817 @default.
- W1985451211 hasConceptScore W1985451211C544956773 @default.
- W1985451211 hasConceptScore W1985451211C57410435 @default.
- W1985451211 hasConceptScore W1985451211C62520636 @default.
- W1985451211 hasConceptScore W1985451211C64297162 @default.
- W1985451211 hasConceptScore W1985451211C86803240 @default.
- W1985451211 hasIssue "4" @default.
- W1985451211 hasLocation W19854512111 @default.
- W1985451211 hasOpenAccess W1985451211 @default.
- W1985451211 hasPrimaryLocation W19854512111 @default.
- W1985451211 hasRelatedWork W1968362441 @default.
- W1985451211 hasRelatedWork W2000931135 @default.
- W1985451211 hasRelatedWork W2026230761 @default.
- W1985451211 hasRelatedWork W2037369940 @default.
- W1985451211 hasRelatedWork W2041065845 @default.
- W1985451211 hasRelatedWork W2061965187 @default.
- W1985451211 hasRelatedWork W2078183599 @default.
- W1985451211 hasRelatedWork W2950013212 @default.
- W1985451211 hasRelatedWork W3160536120 @default.
- W1985451211 hasRelatedWork W4250800078 @default.
- W1985451211 hasVolume "58" @default.
- W1985451211 isParatext "false" @default.
- W1985451211 isRetracted "false" @default.
- W1985451211 magId "1985451211" @default.
- W1985451211 workType "article" @default.