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- W1985504395 endingPage "2224" @default.
- W1985504395 startingPage "2223" @default.
- W1985504395 abstract "A high-resistivity layer formed beneath the silicon surface layer by using proton implantation and two-step annealing is described. Rapid thermal annealing with tungsten halogen lamps was carried out during the first annealing step and the time of the high-temperature treatment in the second annealing step was comparatively long. Experiments show that the quality of the top layer has been improved with the increase in surface Hall mobility of ∼25%. This novel semiconductor will likely be a new material for the manufacture of very high speed integrated circuits." @default.
- W1985504395 created "2016-06-24" @default.
- W1985504395 creator A5043070856 @default.
- W1985504395 date "1989-11-20" @default.
- W1985504395 modified "2023-09-26" @default.
- W1985504395 title "Novel semiconductor substrate formed by hydrogen ion implantation into silicon" @default.
- W1985504395 cites W2002047372 @default.
- W1985504395 doi "https://doi.org/10.1063/1.102067" @default.
- W1985504395 hasPublicationYear "1989" @default.
- W1985504395 type Work @default.
- W1985504395 sameAs 1985504395 @default.
- W1985504395 citedByCount "23" @default.
- W1985504395 countsByYear W19855043952013 @default.
- W1985504395 countsByYear W19855043952017 @default.
- W1985504395 crossrefType "journal-article" @default.
- W1985504395 hasAuthorship W1985504395A5043070856 @default.
- W1985504395 hasConcept C108225325 @default.
- W1985504395 hasConcept C119599485 @default.
- W1985504395 hasConcept C127413603 @default.
- W1985504395 hasConcept C145148216 @default.
- W1985504395 hasConcept C171250308 @default.
- W1985504395 hasConcept C178790620 @default.
- W1985504395 hasConcept C185592680 @default.
- W1985504395 hasConcept C191897082 @default.
- W1985504395 hasConcept C192562407 @default.
- W1985504395 hasConcept C2777855556 @default.
- W1985504395 hasConcept C2779227376 @default.
- W1985504395 hasConcept C41823505 @default.
- W1985504395 hasConcept C49040817 @default.
- W1985504395 hasConcept C542268612 @default.
- W1985504395 hasConcept C544956773 @default.
- W1985504395 hasConcept C57863236 @default.
- W1985504395 hasConcept C69990965 @default.
- W1985504395 hasConcept C79635011 @default.
- W1985504395 hasConceptScore W1985504395C108225325 @default.
- W1985504395 hasConceptScore W1985504395C119599485 @default.
- W1985504395 hasConceptScore W1985504395C127413603 @default.
- W1985504395 hasConceptScore W1985504395C145148216 @default.
- W1985504395 hasConceptScore W1985504395C171250308 @default.
- W1985504395 hasConceptScore W1985504395C178790620 @default.
- W1985504395 hasConceptScore W1985504395C185592680 @default.
- W1985504395 hasConceptScore W1985504395C191897082 @default.
- W1985504395 hasConceptScore W1985504395C192562407 @default.
- W1985504395 hasConceptScore W1985504395C2777855556 @default.
- W1985504395 hasConceptScore W1985504395C2779227376 @default.
- W1985504395 hasConceptScore W1985504395C41823505 @default.
- W1985504395 hasConceptScore W1985504395C49040817 @default.
- W1985504395 hasConceptScore W1985504395C542268612 @default.
- W1985504395 hasConceptScore W1985504395C544956773 @default.
- W1985504395 hasConceptScore W1985504395C57863236 @default.
- W1985504395 hasConceptScore W1985504395C69990965 @default.
- W1985504395 hasConceptScore W1985504395C79635011 @default.
- W1985504395 hasIssue "21" @default.
- W1985504395 hasLocation W19855043951 @default.
- W1985504395 hasOpenAccess W1985504395 @default.
- W1985504395 hasPrimaryLocation W19855043951 @default.
- W1985504395 hasRelatedWork W1623063880 @default.
- W1985504395 hasRelatedWork W1974017507 @default.
- W1985504395 hasRelatedWork W1975324143 @default.
- W1985504395 hasRelatedWork W1985504395 @default.
- W1985504395 hasRelatedWork W2017331004 @default.
- W1985504395 hasRelatedWork W2046703922 @default.
- W1985504395 hasRelatedWork W2048383801 @default.
- W1985504395 hasRelatedWork W2094221410 @default.
- W1985504395 hasRelatedWork W2371329210 @default.
- W1985504395 hasRelatedWork W2625730842 @default.
- W1985504395 hasVolume "55" @default.
- W1985504395 isParatext "false" @default.
- W1985504395 isRetracted "false" @default.
- W1985504395 magId "1985504395" @default.
- W1985504395 workType "article" @default.