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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1985571248> ?p ?o ?g. }

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• W1985571248 abstract "It is generally considered that methane is not a suitable carbon precursor for growth of silicon carbide (SiC) epitaxial layers by Chemical Vapor Deposition (CVD) since its use renders epitaxial la ..." @default.
• W1985571248 created "2016-06-24" @default.
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• W1985571248 date "2014-03-01" @default.
• W1985571248 modified "2023-09-27" @default.
• W1985571248 title "On the use of methane as a carbon precursor in Chemical Vapor Deposition of silicon carbide" @default.
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• W1985571248 doi "https://doi.org/10.1016/j.jcrysgro.2013.12.033" @default.
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