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- W1985588081 abstract "This paper deals with the reshaping technology for realizing three-dimensional (3-D) microstructures through plastic deformation of single-crystal silicon (SCS) films by applying Joule heating. SCS beams are used for determining the behavior of SCS microstructures during reshaping. The reshaped SCS structure has a sharp corner at a point where stress and heat are concentrated. The plastic deformation caused by flow stress results in permanent 3-D shapes." @default.
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- W1985588081 date "1999-03-01" @default.
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- W1985588081 title "Reshaping of Single-Crystal Silicon Microstructures" @default.
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- W1985588081 doi "https://doi.org/10.1143/jjap.38.1580" @default.
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