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- W1985619005 abstract "We show simulation images of projection microscope, which uses parallel beam to the sample, detecting secondary electrons, photoelectrons and mirror electrons using electrons and UV/X-ray sources as probe beam. The results show we can see image for square and dense line patterns without charging and damage in the objects. This research can be used for quantitative analysis for projection microscope using multi beam source to get comprehensive information of many characteristics of objects as well as topographic information." @default.
- W1985619005 created "2016-06-24" @default.
- W1985619005 creator A5006337483 @default.
- W1985619005 creator A5020867036 @default.
- W1985619005 date "2002-07-01" @default.
- W1985619005 modified "2023-09-23" @default.
- W1985619005 title "Simulation of imaging in projection microscope using multibeam probe" @default.
- W1985619005 doi "https://doi.org/10.1117/12.473497" @default.
- W1985619005 hasPublicationYear "2002" @default.
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