Matches in SemOpenAlex for { <https://semopenalex.org/work/W1985654799> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W1985654799 endingPage "C473" @default.
- W1985654799 startingPage "C473" @default.
- W1985654799 abstract "The effect of carrier gases, such as argon, nitrogen, and hydrogen on the deposition rate, film morphology, resistivity, and chemical composition of copper films deposited with (hfac: hexafluoroacetylacetonate) Cu (1) (DMB: 3,3-dimethyl-1-butene) precursor was investigated at suhstrate temperatures between 100 and 275°C. The deposition rate was the highest and the resistivity was the lowest with the hydrogen carrier gas and the film had the smallest amount of impurities such as carbon, oxygen, and fluorine, It is believed that hydrogen enhances the surface reaction and forms more volatile species with impurity atoms The diffusion of the reactant in hydrogen gas is higher, which also leads to the higher deposition rate. Below the substrate temperature of 150°C, the activation energy of the deposition rate was about 150 kJ mol 1 on thermal oxide and about 84 ∼ 96 kJ mol -1 on TiN with both argon and nitrogen, hut it is about 54 kJ mol 1 with hydrogen carrier gas on both surfaces, The copper film deposited with hydrogen carrier gas has a higher ratio of the Cu(111) peak intensity to the Cu(200) peak intensity than in argon carrier gas." @default.
- W1985654799 created "2016-06-24" @default.
- W1985654799 creator A5015635452 @default.
- W1985654799 creator A5045008302 @default.
- W1985654799 date "2001-01-01" @default.
- W1985654799 modified "2023-10-16" @default.
- W1985654799 title "Effect of Carrier Gas on Chemical Vapor Deposition of Copper with (Hexafluoroacetylacetonate)Cu[sup (I)](3,3-Dimethyl-1-butene)" @default.
- W1985654799 cites W1968756222 @default.
- W1985654799 cites W1969410029 @default.
- W1985654799 cites W1973429046 @default.
- W1985654799 cites W1995483390 @default.
- W1985654799 cites W1995608017 @default.
- W1985654799 cites W2004243834 @default.
- W1985654799 cites W2007797834 @default.
- W1985654799 cites W2015411593 @default.
- W1985654799 cites W2028268078 @default.
- W1985654799 cites W2041225766 @default.
- W1985654799 cites W2052486868 @default.
- W1985654799 cites W2056129256 @default.
- W1985654799 cites W2067939792 @default.
- W1985654799 cites W2074804558 @default.
- W1985654799 cites W2074837773 @default.
- W1985654799 cites W2086481406 @default.
- W1985654799 cites W2088997239 @default.
- W1985654799 cites W4254583743 @default.
- W1985654799 doi "https://doi.org/10.1149/1.1375168" @default.
- W1985654799 hasPublicationYear "2001" @default.
- W1985654799 type Work @default.
- W1985654799 sameAs 1985654799 @default.
- W1985654799 citedByCount "12" @default.
- W1985654799 countsByYear W19856547992012 @default.
- W1985654799 countsByYear W19856547992014 @default.
- W1985654799 countsByYear W19856547992018 @default.
- W1985654799 countsByYear W19856547992019 @default.
- W1985654799 countsByYear W19856547992020 @default.
- W1985654799 crossrefType "journal-article" @default.
- W1985654799 hasAuthorship W1985654799A5015635452 @default.
- W1985654799 hasAuthorship W1985654799A5045008302 @default.
- W1985654799 hasBestOaLocation W19856547992 @default.
- W1985654799 hasConcept C151730666 @default.
- W1985654799 hasConcept C161790260 @default.
- W1985654799 hasConcept C178790620 @default.
- W1985654799 hasConcept C179104552 @default.
- W1985654799 hasConcept C185592680 @default.
- W1985654799 hasConcept C192562407 @default.
- W1985654799 hasConcept C2778601030 @default.
- W1985654799 hasConcept C2816523 @default.
- W1985654799 hasConcept C544778455 @default.
- W1985654799 hasConcept C57410435 @default.
- W1985654799 hasConcept C64297162 @default.
- W1985654799 hasConcept C86803240 @default.
- W1985654799 hasConceptScore W1985654799C151730666 @default.
- W1985654799 hasConceptScore W1985654799C161790260 @default.
- W1985654799 hasConceptScore W1985654799C178790620 @default.
- W1985654799 hasConceptScore W1985654799C179104552 @default.
- W1985654799 hasConceptScore W1985654799C185592680 @default.
- W1985654799 hasConceptScore W1985654799C192562407 @default.
- W1985654799 hasConceptScore W1985654799C2778601030 @default.
- W1985654799 hasConceptScore W1985654799C2816523 @default.
- W1985654799 hasConceptScore W1985654799C544778455 @default.
- W1985654799 hasConceptScore W1985654799C57410435 @default.
- W1985654799 hasConceptScore W1985654799C64297162 @default.
- W1985654799 hasConceptScore W1985654799C86803240 @default.
- W1985654799 hasIssue "7" @default.
- W1985654799 hasLocation W19856547991 @default.
- W1985654799 hasLocation W19856547992 @default.
- W1985654799 hasOpenAccess W1985654799 @default.
- W1985654799 hasPrimaryLocation W19856547991 @default.
- W1985654799 hasRelatedWork W1970611244 @default.
- W1985654799 hasRelatedWork W1973961424 @default.
- W1985654799 hasRelatedWork W1977266562 @default.
- W1985654799 hasRelatedWork W1988257323 @default.
- W1985654799 hasRelatedWork W1992903221 @default.
- W1985654799 hasRelatedWork W2352560521 @default.
- W1985654799 hasRelatedWork W2550677491 @default.
- W1985654799 hasRelatedWork W2557666381 @default.
- W1985654799 hasRelatedWork W2580481539 @default.
- W1985654799 hasRelatedWork W2899084033 @default.
- W1985654799 hasVolume "148" @default.
- W1985654799 isParatext "false" @default.
- W1985654799 isRetracted "false" @default.
- W1985654799 magId "1985654799" @default.
- W1985654799 workType "article" @default.