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- W1985718940 abstract "In this paper, an analytical model of the mechanical behavior of a resonant beam sensor actuated by a bent beam thermal actuator is presented. The system is divided into two main subsystems: bent beam actuator and resonant beam sensor. Each subsystem is studied separately and then the model of the original system is derived based on the models of subsystems." @default.
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- W1985718940 date "2006-01-21" @default.
- W1985718940 modified "2023-09-23" @default.
- W1985718940 title "Modeling and analysis of MEMS-based resonant sensor actuated by bent beam thermal actuator" @default.
- W1985718940 doi "https://doi.org/10.1117/12.645309" @default.
- W1985718940 hasPublicationYear "2006" @default.
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