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- W1985929171 abstract "In this study we manufacture AZO transparent thin films with E-gun evaporator and change the flow rate of oxygen to find which parameter can fabricate the best quality AZO thin films. After analyze the material characteristics of AZO thin films we fabricated. We can acquire the best parameter is heating the substrate to 150°C and without oxygen flow. With this parameter, we can obtain AZO thin film with transparency above 90% and extremely low resistivity reach to 2.4 × 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-4</sup> (ohm-cm). Apply its on light emitting diode can also get large profit in luminescence." @default.
- W1985929171 created "2016-06-24" @default.
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- W1985929171 date "2008-10-01" @default.
- W1985929171 modified "2023-09-22" @default.
- W1985929171 title "AZO transparent thin film with E-gun evaporate procedure and application on light emitting diode" @default.
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- W1985929171 doi "https://doi.org/10.1109/icsict.2008.4734716" @default.
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