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• W1986036812 abstract "Nano-electromachining (nano-EM) is a process in which electric fields applied across sub-20 nm tool-workpiece gaps in organic dielectrics (n-decane C10H22 and n-undecane C12H26) are used to produce nanometer size features (8–80 nm) in electrically conductive materials. In order to improve the speed of nano-EM for manufacturing, utilization of pulse breakdown phenomena is studied. Linear behavior of Paschen curves for pulse breakdown demonstrated the predictability of pulse nano-EM process. The discharge current in the machining gap showed exponential decay behavior in the post-breakdown regime with certain delay. This delay in current recovery may present a limit to improving nano-EM production speeds and suggests a need for external pressurized dielectric flow over self-guided diffusion. Other notable effects such as adsorption compression limited dielectric diffusion and the variation in the recovery current with the tool-workpiece gap along with their engineering implications are discussed." @default.
• W1986036812 created "2016-06-24" @default.
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• W1986036812 date "2010-06-01" @default.
• W1986036812 modified "2023-09-26" @default.
• W1986036812 title "Pulse Breakdown in Sub-20 nm Organic Dielectrics for Nanoscale-Electromachining (nano-EM)" @default.
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• W1986036812 doi "https://doi.org/10.1115/1.4001718" @default.
• W1986036812 hasPublicationYear "2010" @default.
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