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• W1986072029 abstract "We demonstrate a systematic approach to subwavelength resolution lithographic image formation on films covering areas larger than a wavelength squared. For example, it is possible to make a lithographic pattern with a feature size resolution of $ensuremath{lambda}/[2(N+1)]$ by using a particular 2M-photon, multimode entangled state, where $N<~M,$ and banks of birefringent plates. By preparing such a statistically mixed state, one can form any pixel pattern on a ${2}^{Mensuremath{-}N}(N+1)ifmmodetimeselsetexttimesfi{}{2}^{Mensuremath{-}N}(N+1)$ pixel grid occupying a square with side ${L=2}^{Mensuremath{-}Nensuremath{-}1}ensuremath{lambda}.$ Hence, there is a trade off between the exposed area, the minimum lithographic feature size resolution, and the number of photons used for the exposure. We also show that the proposed method will work even under nonideal conditions, albeit with somewhat poorer performance." @default.
• W1986072029 created "2016-06-24" @default.
• W1986072029 creator A5005206397 @default.
• W1986072029 creator A5061789746 @default.
• W1986072029 creator A5086999746 @default.
• W1986072029 date "2001-06-08" @default.
• W1986072029 modified "2023-10-16" @default.
• W1986072029 title "Subwavelength lithography over extended areas" @default.
• W1986072029 cites W1970020546 @default.
• W1986072029 cites W1970782469 @default.
• W1986072029 cites W1978532747 @default.
• W1986072029 cites W1986596810 @default.
• W1986072029 cites W1992182803 @default.
• W1986072029 cites W2001007246 @default.
• W1986072029 cites W2015229469 @default.
• W1986072029 cites W2015876000 @default.
• W1986072029 cites W2018171338 @default.
• W1986072029 cites W2026595442 @default.
• W1986072029 cites W2031963089 @default.
• W1986072029 cites W2034217764 @default.
• W1986072029 cites W2036429989 @default.
• W1986072029 cites W2042286044 @default.
• W1986072029 cites W2045005832 @default.
• W1986072029 cites W2051618454 @default.
• W1986072029 cites W2064774476 @default.
• W1986072029 cites W2065262077 @default.
• W1986072029 cites W2067288358 @default.
• W1986072029 cites W2073595745 @default.
• W1986072029 cites W2074555283 @default.
• W1986072029 cites W2080805755 @default.
• W1986072029 cites W2095316810 @default.
• W1986072029 cites W2114089071 @default.
• W1986072029 cites W2118440388 @default.
• W1986072029 cites W2130004040 @default.
• W1986072029 cites W2151834147 @default.
• W1986072029 cites W2152231616 @default.
• W1986072029 cites W2329707166 @default.
• W1986072029 cites W3122278850 @default.
• W1986072029 doi "https://doi.org/10.1103/physreva.64.013811" @default.
• W1986072029 hasPublicationYear "2001" @default.
• W1986072029 type Work @default.
• W1986072029 sameAs 1986072029 @default.
• W1986072029 citedByCount "25" @default.
• W1986072029 countsByYear W19860720292013 @default.
• W1986072029 countsByYear W19860720292014 @default.
• W1986072029 countsByYear W19860720292015 @default.
• W1986072029 countsByYear W19860720292016 @default.
• W1986072029 countsByYear W19860720292017 @default.
• W1986072029 countsByYear W19860720292019 @default.
• W1986072029 crossrefType "journal-article" @default.
• W1986072029 hasAuthorship W1986072029A5005206397 @default.
• W1986072029 hasAuthorship W1986072029A5061789746 @default.
• W1986072029 hasAuthorship W1986072029A5086999746 @default.
• W1986072029 hasBestOaLocation W19860720292 @default.
• W1986072029 hasConcept C120665830 @default.
• W1986072029 hasConcept C121332964 @default.
• W1986072029 hasConcept C125743686 @default.
• W1986072029 hasConcept C135692309 @default.
• W1986072029 hasConcept C138268822 @default.
• W1986072029 hasConcept C138885662 @default.
• W1986072029 hasConcept C154945302 @default.
• W1986072029 hasConcept C159317903 @default.
• W1986072029 hasConcept C160633673 @default.
• W1986072029 hasConcept C204223013 @default.
• W1986072029 hasConcept C2524010 @default.
• W1986072029 hasConcept C2776401178 @default.
• W1986072029 hasConcept C2778113609 @default.
• W1986072029 hasConcept C33923547 @default.
• W1986072029 hasConcept C41008148 @default.
• W1986072029 hasConcept C41895202 @default.
• W1986072029 hasConcept C6260449 @default.
• W1986072029 hasConceptScore W1986072029C120665830 @default.
• W1986072029 hasConceptScore W1986072029C121332964 @default.
• W1986072029 hasConceptScore W1986072029C125743686 @default.
• W1986072029 hasConceptScore W1986072029C135692309 @default.
• W1986072029 hasConceptScore W1986072029C138268822 @default.
• W1986072029 hasConceptScore W1986072029C138885662 @default.
• W1986072029 hasConceptScore W1986072029C154945302 @default.
• W1986072029 hasConceptScore W1986072029C159317903 @default.
• W1986072029 hasConceptScore W1986072029C160633673 @default.
• W1986072029 hasConceptScore W1986072029C204223013 @default.
• W1986072029 hasConceptScore W1986072029C2524010 @default.
• W1986072029 hasConceptScore W1986072029C2776401178 @default.
• W1986072029 hasConceptScore W1986072029C2778113609 @default.
• W1986072029 hasConceptScore W1986072029C33923547 @default.
• W1986072029 hasConceptScore W1986072029C41008148 @default.
• W1986072029 hasConceptScore W1986072029C41895202 @default.
• W1986072029 hasConceptScore W1986072029C6260449 @default.
• W1986072029 hasIssue "1" @default.
• W1986072029 hasLocation W19860720291 @default.
• W1986072029 hasLocation W19860720292 @default.
• W1986072029 hasOpenAccess W1986072029 @default.
• W1986072029 hasPrimaryLocation W19860720291 @default.
• W1986072029 hasRelatedWork W1972032534 @default.
• W1986072029 hasRelatedWork W1991742669 @default.
• W1986072029 hasRelatedWork W2013400554 @default.
• W1986072029 hasRelatedWork W2017522102 @default.
• W1986072029 hasRelatedWork W2026059381 @default.
• W1986072029 hasRelatedWork W2031864651 @default.
• W1986072029 hasRelatedWork W2038861837 @default.

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