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- W1986200075 endingPage "72" @default.
- W1986200075 startingPage "69" @default.
- W1986200075 abstract "Gas phase etching of 4H SiC n+ substrates was performed utilizing chlorine containing etch chemistries in a hot wall CVD system. Carbon and silicon vapor were added to explore selective etching reactions on the wafer surface. The impact of the etch on the bare wafer surface as a function of temperature and etch chemistry is investigated. Selection of the etch chemistry and temperature are critical to ensure a smooth etched surface on which to begin epitaxial deposition. Etching also influences defect propagation from the substrate into the epitaxial layer. The results show etch chemistry reactions will influence the conversion of micropipes in the epi buffer layer." @default.
- W1986200075 created "2016-06-24" @default.
- W1986200075 creator A5003398528 @default.
- W1986200075 creator A5005566234 @default.
- W1986200075 creator A5046157061 @default.
- W1986200075 creator A5065925423 @default.
- W1986200075 creator A5071024780 @default.
- W1986200075 creator A5081479494 @default.
- W1986200075 creator A5021366768 @default.
- W1986200075 date "2007-09-01" @default.
- W1986200075 modified "2023-09-24" @default.
- W1986200075 title "Comparison of Chlorine Based In Situ Etching of 4H SiC Substrates" @default.
- W1986200075 doi "https://doi.org/10.4028/www.scientific.net/msf.556-557.69" @default.
- W1986200075 hasPublicationYear "2007" @default.
- W1986200075 type Work @default.
- W1986200075 sameAs 1986200075 @default.
- W1986200075 citedByCount "0" @default.
- W1986200075 crossrefType "journal-article" @default.
- W1986200075 hasAuthorship W1986200075A5003398528 @default.
- W1986200075 hasAuthorship W1986200075A5005566234 @default.
- W1986200075 hasAuthorship W1986200075A5021366768 @default.
- W1986200075 hasAuthorship W1986200075A5046157061 @default.
- W1986200075 hasAuthorship W1986200075A5065925423 @default.
- W1986200075 hasAuthorship W1986200075A5071024780 @default.
- W1986200075 hasAuthorship W1986200075A5081479494 @default.
- W1986200075 hasConcept C100460472 @default.
- W1986200075 hasConcept C104779481 @default.
- W1986200075 hasConcept C110738630 @default.
- W1986200075 hasConcept C111368507 @default.
- W1986200075 hasConcept C127313418 @default.
- W1986200075 hasConcept C127413603 @default.
- W1986200075 hasConcept C1291036 @default.
- W1986200075 hasConcept C130472188 @default.
- W1986200075 hasConcept C140205800 @default.
- W1986200075 hasConcept C159985019 @default.
- W1986200075 hasConcept C160671074 @default.
- W1986200075 hasConcept C171250308 @default.
- W1986200075 hasConcept C191897082 @default.
- W1986200075 hasConcept C192562407 @default.
- W1986200075 hasConcept C2777289219 @default.
- W1986200075 hasConcept C2779227376 @default.
- W1986200075 hasConcept C42360764 @default.
- W1986200075 hasConcept C49040817 @default.
- W1986200075 hasConcept C505241676 @default.
- W1986200075 hasConcept C544956773 @default.
- W1986200075 hasConcept C57410435 @default.
- W1986200075 hasConceptScore W1986200075C100460472 @default.
- W1986200075 hasConceptScore W1986200075C104779481 @default.
- W1986200075 hasConceptScore W1986200075C110738630 @default.
- W1986200075 hasConceptScore W1986200075C111368507 @default.
- W1986200075 hasConceptScore W1986200075C127313418 @default.
- W1986200075 hasConceptScore W1986200075C127413603 @default.
- W1986200075 hasConceptScore W1986200075C1291036 @default.
- W1986200075 hasConceptScore W1986200075C130472188 @default.
- W1986200075 hasConceptScore W1986200075C140205800 @default.
- W1986200075 hasConceptScore W1986200075C159985019 @default.
- W1986200075 hasConceptScore W1986200075C160671074 @default.
- W1986200075 hasConceptScore W1986200075C171250308 @default.
- W1986200075 hasConceptScore W1986200075C191897082 @default.
- W1986200075 hasConceptScore W1986200075C192562407 @default.
- W1986200075 hasConceptScore W1986200075C2777289219 @default.
- W1986200075 hasConceptScore W1986200075C2779227376 @default.
- W1986200075 hasConceptScore W1986200075C42360764 @default.
- W1986200075 hasConceptScore W1986200075C49040817 @default.
- W1986200075 hasConceptScore W1986200075C505241676 @default.
- W1986200075 hasConceptScore W1986200075C544956773 @default.
- W1986200075 hasConceptScore W1986200075C57410435 @default.
- W1986200075 hasLocation W19862000751 @default.
- W1986200075 hasOpenAccess W1986200075 @default.
- W1986200075 hasPrimaryLocation W19862000751 @default.
- W1986200075 hasRelatedWork W1926448700 @default.
- W1986200075 hasRelatedWork W1968581245 @default.
- W1986200075 hasRelatedWork W1998542313 @default.
- W1986200075 hasRelatedWork W2013557620 @default.
- W1986200075 hasRelatedWork W2023483409 @default.
- W1986200075 hasRelatedWork W2287155507 @default.
- W1986200075 hasRelatedWork W2325923524 @default.
- W1986200075 hasRelatedWork W2371338989 @default.
- W1986200075 hasRelatedWork W2903101056 @default.
- W1986200075 hasRelatedWork W4285092166 @default.
- W1986200075 hasVolume "556-557" @default.
- W1986200075 isParatext "false" @default.
- W1986200075 isRetracted "false" @default.
- W1986200075 magId "1986200075" @default.
- W1986200075 workType "article" @default.