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- W1986244823 abstract "For the purpose of searching information on the desired purity specification optimum of refractory metal/silicide materials to be used by the IC manufacturer, the views of a material supplier are presented. In particular, ‘‘high purity’’ does not necessarily mean high quality, because all impurities are not equal. Samples of materials representing currently achievable production technology have been collected and analyzed (principally by spark-source mass-spectrometry). Impurities are grouped into three categories, the known sensitive elements (alkalis and α emitters particularly uranium/thorium), the major impurities (mostly the 4th period transition elements) which define the overall purity, and other impurities in lesser concentrations with ill-defined effects on material usefulness. The uranium content as a source of soft error is discussed in some detail. A specification for refractory metals/silicides for VLSI application is proposed for industry consideration." @default.
- W1986244823 created "2016-06-24" @default.
- W1986244823 creator A5012368098 @default.
- W1986244823 date "1984-10-01" @default.
- W1986244823 modified "2023-09-25" @default.
- W1986244823 title "Impurities in refractory metals/silicides" @default.
- W1986244823 doi "https://doi.org/10.1116/1.582867" @default.
- W1986244823 hasPublicationYear "1984" @default.
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