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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1986321449> ?p ?o ?g. }

• W1986321449 endingPage "074006" @default.
• W1986321449 startingPage "074006" @default.
• W1986321449 abstract "In this paper we present a low-cost, room-temperature process for integrating carbon nanotubes on Si microsystems. The process uses localized resistive heating by controlling current through suspended microbridges, to provide local temperatures high enough for CVD growth of carbon nanotubes. Locally grown carbon nanotubes make electrical connections through guidance by electric fields, thus eventually making circuits. The process is scalable to a wafer level batch process. Furthermore, it is controlled electrically, thus enabling automated control. Direct integration of carbon nanotubes in microstructures has great promise for nano-functional devices, such as ultrasensitive chemical sensors. Initial measurements demonstrate the Si–carbon nanotube–Si circuit's potential as a NH3 sensor." @default.
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• W1986321449 date "2012-06-22" @default.
• W1986321449 modified "2023-09-24" @default.
• W1986321449 title "Direct integration of carbon nanotubes in Si microstructures" @default.
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• W1986321449 doi "https://doi.org/10.1088/0960-1317/22/7/074006" @default.
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