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- W1986367091 abstract "Different measurement methods exist for the extraction of the coefficient of thermal expansion (CTE). Among them the observation of the sample length as a function of its temperature is the direct way. In the last decade, the use of phase shifting interferometry in combination with computer-based analysis of interference phase maps drastically improved interferometrical length measurements. In addition to the observation of the length itself, such measurements allow the extraction of a length topography L(x,y) of the sample as shown in this paper. From the behaviour of the length topography at different temperatures an upper limit of CTE-homogeneity can be obtained. It is shown in which way disturbing influences can be removed so that uncertainties of L(x,y) in the sub-nm range can be reached for different shaped samples" @default.
- W1986367091 created "2016-06-24" @default.
- W1986367091 creator A5021882847 @default.
- W1986367091 date "2005-06-30" @default.
- W1986367091 modified "2023-09-23" @default.
- W1986367091 title "Investigation of thermal expansion homogeneity by optical interferometry" @default.
- W1986367091 doi "https://doi.org/10.1117/12.612582" @default.
- W1986367091 hasPublicationYear "2005" @default.
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