Matches in SemOpenAlex for { <https://semopenalex.org/work/W1986382562> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W1986382562 abstract "Critical lithographic dimensions will soon place particularly severe demands on the performance of chemically amplified (CA) resists. Although Extreme Ultraviolet (EUV) and 193 nm (immersion interferometric) lithographic results have demonstrated half pitch imaging down to 35 nm there is nonetheless a concern that image blur due to acid diffusion will begin to seriously impact the utility of CA photoresists. Previously we demonstrated that low activation energy resists and E-Beam lithography can be used to print line/space arrays with resolution approaching 20 nm. We described the factors impacting the reactivity of ketal/pHOST based resists and compared the attainable resolution under different processing conditions. In this report we describe studies on acid diffusion emphasizing the role of water in low Ea systems. We also discuss methods for the control of water absorption in low Ea resists." @default.
- W1986382562 created "2016-06-24" @default.
- W1986382562 creator A5000487325 @default.
- W1986382562 creator A5005218219 @default.
- W1986382562 creator A5008058405 @default.
- W1986382562 creator A5024710133 @default.
- W1986382562 creator A5026998355 @default.
- W1986382562 creator A5033211193 @default.
- W1986382562 creator A5037116125 @default.
- W1986382562 creator A5042982993 @default.
- W1986382562 creator A5047364570 @default.
- W1986382562 creator A5049857121 @default.
- W1986382562 creator A5053483518 @default.
- W1986382562 creator A5053836824 @default.
- W1986382562 creator A5056794709 @default.
- W1986382562 creator A5064701740 @default.
- W1986382562 creator A5066391265 @default.
- W1986382562 date "2005-05-04" @default.
- W1986382562 modified "2023-09-27" @default.
- W1986382562 title "Studies of acid diffusion in low Ea chemically amplified photoresists" @default.
- W1986382562 doi "https://doi.org/10.1117/12.601759" @default.
- W1986382562 hasPublicationYear "2005" @default.
- W1986382562 type Work @default.
- W1986382562 sameAs 1986382562 @default.
- W1986382562 citedByCount "5" @default.
- W1986382562 countsByYear W19863825622014 @default.
- W1986382562 countsByYear W19863825622016 @default.
- W1986382562 countsByYear W19863825622019 @default.
- W1986382562 crossrefType "proceedings-article" @default.
- W1986382562 hasAuthorship W1986382562A5000487325 @default.
- W1986382562 hasAuthorship W1986382562A5005218219 @default.
- W1986382562 hasAuthorship W1986382562A5008058405 @default.
- W1986382562 hasAuthorship W1986382562A5024710133 @default.
- W1986382562 hasAuthorship W1986382562A5026998355 @default.
- W1986382562 hasAuthorship W1986382562A5033211193 @default.
- W1986382562 hasAuthorship W1986382562A5037116125 @default.
- W1986382562 hasAuthorship W1986382562A5042982993 @default.
- W1986382562 hasAuthorship W1986382562A5047364570 @default.
- W1986382562 hasAuthorship W1986382562A5049857121 @default.
- W1986382562 hasAuthorship W1986382562A5053483518 @default.
- W1986382562 hasAuthorship W1986382562A5053836824 @default.
- W1986382562 hasAuthorship W1986382562A5056794709 @default.
- W1986382562 hasAuthorship W1986382562A5064701740 @default.
- W1986382562 hasAuthorship W1986382562A5066391265 @default.
- W1986382562 hasConcept C120665830 @default.
- W1986382562 hasConcept C121332964 @default.
- W1986382562 hasConcept C146024833 @default.
- W1986382562 hasConcept C162996421 @default.
- W1986382562 hasConcept C171250308 @default.
- W1986382562 hasConcept C177409738 @default.
- W1986382562 hasConcept C192562407 @default.
- W1986382562 hasConcept C200274948 @default.
- W1986382562 hasConcept C204223013 @default.
- W1986382562 hasConcept C2779227376 @default.
- W1986382562 hasConcept C49040817 @default.
- W1986382562 hasConcept C520434653 @default.
- W1986382562 hasConcept C53524968 @default.
- W1986382562 hasConcept C69357855 @default.
- W1986382562 hasConcept C94263209 @default.
- W1986382562 hasConcept C97355855 @default.
- W1986382562 hasConceptScore W1986382562C120665830 @default.
- W1986382562 hasConceptScore W1986382562C121332964 @default.
- W1986382562 hasConceptScore W1986382562C146024833 @default.
- W1986382562 hasConceptScore W1986382562C162996421 @default.
- W1986382562 hasConceptScore W1986382562C171250308 @default.
- W1986382562 hasConceptScore W1986382562C177409738 @default.
- W1986382562 hasConceptScore W1986382562C192562407 @default.
- W1986382562 hasConceptScore W1986382562C200274948 @default.
- W1986382562 hasConceptScore W1986382562C204223013 @default.
- W1986382562 hasConceptScore W1986382562C2779227376 @default.
- W1986382562 hasConceptScore W1986382562C49040817 @default.
- W1986382562 hasConceptScore W1986382562C520434653 @default.
- W1986382562 hasConceptScore W1986382562C53524968 @default.
- W1986382562 hasConceptScore W1986382562C69357855 @default.
- W1986382562 hasConceptScore W1986382562C94263209 @default.
- W1986382562 hasConceptScore W1986382562C97355855 @default.
- W1986382562 hasLocation W19863825621 @default.
- W1986382562 hasOpenAccess W1986382562 @default.
- W1986382562 hasPrimaryLocation W19863825621 @default.
- W1986382562 hasRelatedWork W2006900277 @default.
- W1986382562 hasRelatedWork W2052625931 @default.
- W1986382562 hasRelatedWork W2060678621 @default.
- W1986382562 hasRelatedWork W2064596508 @default.
- W1986382562 hasRelatedWork W2076522755 @default.
- W1986382562 hasRelatedWork W2104684732 @default.
- W1986382562 hasRelatedWork W2174426231 @default.
- W1986382562 hasRelatedWork W2312297224 @default.
- W1986382562 hasRelatedWork W2600116639 @default.
- W1986382562 hasRelatedWork W4205390864 @default.
- W1986382562 isParatext "false" @default.
- W1986382562 isRetracted "false" @default.
- W1986382562 magId "1986382562" @default.
- W1986382562 workType "article" @default.