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- W1986707918 abstract "The roles of projection printer illumination and resist/substrate layers in the printability of defects are explored in a physical based approach. In this approach the mutual coherence is first calculated, and then the impact of a defect on a feature is calculated using the image perturbation approach. The concerns are that the use of modified illumination and high NA divergence and reflection of the fields in a thin-film might affect the tendency of a defect to print. Results of this extension for various illuminations, thick resists and antireflection coatings are compared with rigorous thin-film SPLAT simulations. The mutual coherence function (MCF) was found to be strongly dependent of the type of illumination and on the mask geometry; however, the MCF was found to be weakly dependent on the presence of substrate material. This indicates that certain types of illumination sources are more defect tolerant and that the substrate is insignificant in preventing defect printing.© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W1986707918 date "1995-05-26" @default.
- W1986707918 modified "2023-09-23" @default.
- W1986707918 title "<title>Role of illumination and thin film layers on the printability of defects</title>" @default.
- W1986707918 doi "https://doi.org/10.1117/12.209283" @default.
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