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- W1986770186 abstract "We evaluated low-impedance power distribution network (PDN) of decoupling capacitor embedded interposers for 3-D integrated LSI system. Measurements are carried out using the developed impedance analyzer system of a wide frequency range for evaluating ultralow impedance, and calculations are carried out using 2.5-D and 3-D finite element method (FEM) electromagnetic field simulator. We fabricated various types of capacitor mounted or capacitor embedded interposers test element group (TEG), such as surface-mounted and embedded chip capacitors, and thin film capacitors on silicon interposers using the same simple design to compare measurement results with calculation ones. As a result, the ultralow impedance evaluation system that has a high measurement dynamic range at the entire measurable frequency band can be realized. Furthermore, by using 2.5-D and 3-D FEM electromagnetic field simulator, it is expected that the accurate and wideband comparative verification of the PDN impedance analysis and evaluation can be realized." @default.
- W1986770186 created "2016-06-24" @default.
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- W1986770186 date "2013-05-01" @default.
- W1986770186 modified "2023-09-27" @default.
- W1986770186 title "Wideband ultralow power distribution network impedance evaluation of decoupling capacitor embedded interposers for 3-D integrated LSI system" @default.
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- W1986770186 doi "https://doi.org/10.1109/ectc.2013.6575726" @default.
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