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• W1986796345 endingPage "06FG11" @default.
• W1986796345 startingPage "06FG11" @default.
• W1986796345 abstract "It is necessary to develop a fast and inexpensive fabrication process of vertical electric wiring by through-silicon via (TSV) technology for advanced three-dimensional semiconductor devices. In this research, a fast-forming conductive composite was successfully developed by simultaneous deposition of conductive organic polymer (polypyrrole) and metal (silver) from the liquid phase, accelerated by photoirradiation. The growth rate of the composite was 38 nm·s -1 , which is more than 10 times higher than that of copper by conventional plating. The electric conductivity of the composite was 2.1×10 4 Ω -1 ·cm -1 , which is on the same level as general metal conductors. In addition, the effects of reaction conditions on the growth rate and the conductivity of the composites were revealed. From these results, the infilling time of the TSV was expected to shorten from the present 2–10 h to 5–10 m." @default.
• W1986796345 created "2016-06-24" @default.
• W1986796345 creator A5020777915 @default.
• W1986796345 creator A5064293462 @default.
• W1986796345 date "2012-06-01" @default.
• W1986796345 modified "2023-09-25" @default.
• W1986796345 title "Fast Formation of Conductive Material by Simultaneous Chemical Process for Infilling Through-Silicon Via" @default.
• W1986796345 cites W1973118504 @default.
• W1986796345 cites W1979510819 @default.
• W1986796345 cites W1989171731 @default.
• W1986796345 cites W1989529042 @default.
• W1986796345 cites W1989840337 @default.
• W1986796345 cites W1990232193 @default.
• W1986796345 cites W1990652894 @default.
• W1986796345 cites W2003049052 @default.
• W1986796345 cites W2011361245 @default.
• W1986796345 cites W2023454207 @default.
• W1986796345 cites W2024396391 @default.
• W1986796345 cites W2037097872 @default.
• W1986796345 cites W2044415186 @default.
• W1986796345 cites W2046308459 @default.
• W1986796345 cites W2046801085 @default.
• W1986796345 cites W2068362851 @default.
• W1986796345 cites W2069756028 @default.
• W1986796345 cites W2082164399 @default.
• W1986796345 cites W2085480970 @default.
• W1986796345 cites W2093681230 @default.
• W1986796345 cites W2110759625 @default.
• W1986796345 cites W2114796574 @default.
• W1986796345 cites W2116252383 @default.
• W1986796345 cites W4243230833 @default.
• W1986796345 doi "https://doi.org/10.1143/jjap.51.06fg11" @default.
• W1986796345 hasPublicationYear "2012" @default.
• W1986796345 type Work @default.
• W1986796345 sameAs 1986796345 @default.
• W1986796345 citedByCount "8" @default.
• W1986796345 countsByYear W19867963452013 @default.
• W1986796345 countsByYear W19867963452014 @default.
• W1986796345 countsByYear W19867963452015 @default.
• W1986796345 countsByYear W19867963452016 @default.
• W1986796345 crossrefType "journal-article" @default.
• W1986796345 hasAuthorship W1986796345A5020777915 @default.
• W1986796345 hasAuthorship W1986796345A5064293462 @default.
• W1986796345 hasConcept C104779481 @default.
• W1986796345 hasConcept C108225325 @default.
• W1986796345 hasConcept C119599485 @default.
• W1986796345 hasConcept C127313418 @default.
• W1986796345 hasConcept C127413603 @default.
• W1986796345 hasConcept C131540310 @default.
• W1986796345 hasConcept C133495861 @default.
• W1986796345 hasConcept C136525101 @default.
• W1986796345 hasConcept C142724271 @default.
• W1986796345 hasConcept C147789679 @default.
• W1986796345 hasConcept C151730666 @default.
• W1986796345 hasConcept C159985019 @default.
• W1986796345 hasConcept C185592680 @default.
• W1986796345 hasConcept C191897082 @default.
• W1986796345 hasConcept C192562407 @default.
• W1986796345 hasConcept C202374169 @default.
• W1986796345 hasConcept C204787440 @default.
• W1986796345 hasConcept C2776985018 @default.
• W1986796345 hasConcept C2816523 @default.
• W1986796345 hasConcept C42360764 @default.
• W1986796345 hasConcept C45632049 @default.
• W1986796345 hasConcept C49040817 @default.
• W1986796345 hasConcept C521977710 @default.
• W1986796345 hasConcept C544153396 @default.
• W1986796345 hasConcept C544778455 @default.
• W1986796345 hasConcept C544956773 @default.
• W1986796345 hasConcept C64297162 @default.
• W1986796345 hasConcept C69990965 @default.
• W1986796345 hasConcept C71924100 @default.
• W1986796345 hasConcept C8058405 @default.
• W1986796345 hasConcept C86803240 @default.
• W1986796345 hasConceptScore W1986796345C104779481 @default.
• W1986796345 hasConceptScore W1986796345C108225325 @default.
• W1986796345 hasConceptScore W1986796345C119599485 @default.
• W1986796345 hasConceptScore W1986796345C127313418 @default.
• W1986796345 hasConceptScore W1986796345C127413603 @default.
• W1986796345 hasConceptScore W1986796345C131540310 @default.
• W1986796345 hasConceptScore W1986796345C133495861 @default.
• W1986796345 hasConceptScore W1986796345C136525101 @default.
• W1986796345 hasConceptScore W1986796345C142724271 @default.
• W1986796345 hasConceptScore W1986796345C147789679 @default.
• W1986796345 hasConceptScore W1986796345C151730666 @default.
• W1986796345 hasConceptScore W1986796345C159985019 @default.
• W1986796345 hasConceptScore W1986796345C185592680 @default.
• W1986796345 hasConceptScore W1986796345C191897082 @default.
• W1986796345 hasConceptScore W1986796345C192562407 @default.
• W1986796345 hasConceptScore W1986796345C202374169 @default.
• W1986796345 hasConceptScore W1986796345C204787440 @default.
• W1986796345 hasConceptScore W1986796345C2776985018 @default.
• W1986796345 hasConceptScore W1986796345C2816523 @default.
• W1986796345 hasConceptScore W1986796345C42360764 @default.
• W1986796345 hasConceptScore W1986796345C45632049 @default.
• W1986796345 hasConceptScore W1986796345C49040817 @default.
• W1986796345 hasConceptScore W1986796345C521977710 @default.
• W1986796345 hasConceptScore W1986796345C544153396 @default.

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