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- W1986851845 abstract "It is well known that across the optical spectrum, indium tin oxide (ITO) has a window of transparency and that it is optically opaque (has a high extinction coefficient, k) at energies outside of the window. Such a material presents a particular challenge to ellipsometry data analysis arising from these different optical behaviors. The purpose of this work is to apply n-k plane data analysis to such an ITO film. An ITO film grown on a silicon substrate was measured at 293 wavelengths, every 5 nm from 210 to 1700 nm, and at each of three incidence angles of 55°, 65°, and 75°. Thus at each wavelength, there are three measurements which result in a set of three solution curves. If measurements had no experimental uncertainty and if the film were “perfect,” the three curves would intersect at a point at the value of film n, k, and d. In actual fact, they come close to intersecting and have a region of closest approach. The key result is that the mathematics supports different approximating film models across wavelength, considering measurement error. In the transparent region from approximately 300–980 nm, the ITO matches a single layer film ideal model while additional layers do not result in improved modeling due to measurement error. On the other hand, due to the underlying mathematics, from 980 to 1000 nm a two-layer ideal model provides two well defined intersections and so there are six real number unknowns which may be determined. At longer wavelengths, the film corresponds to an absorbing layer which appears vertically inhomogeneous but which cannot be well characterized due to the different light interaction depths at the three incidence angles. Lorenz, Cauchy, Drude, generalized oscillator, and other models of optical properties as a function of light wavelength were not used. Additional measurements, for example during film growth, are needed to further refine the modeling." @default.
- W1986851845 created "2016-06-24" @default.
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- W1986851845 date "2011-06-06" @default.
- W1986851845 modified "2023-09-23" @default.
- W1986851845 title "Numerical ellipsometry: n-k plane analysis of transparent conducting films" @default.
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- W1986851845 doi "https://doi.org/10.1116/1.3589803" @default.
- W1986851845 hasPublicationYear "2011" @default.
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