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- W1986977477 abstract "In this paper, the electron beam moire method and AFM scanning moire method are proposed to measure in-plane deformation in micro-scale. The measurement principle and techniques of these two methods are discussed in detail. Additionally, the phase shifting AFM moire method is advanced. The methods are used to measure the thermal deformation in the BGA and QFP electronic packages. The successful results verify the electron beam moire and AFM moire methods are effective tools for measuring micro-scale deformation." @default.
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- W1986977477 date "2001-10-30" @default.
- W1986977477 modified "2023-09-23" @default.
- W1986977477 title "High-resolution micro-moire methods: principles and applications" @default.
- W1986977477 doi "https://doi.org/10.1117/12.447352" @default.
- W1986977477 hasPublicationYear "2001" @default.
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