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- W1986988699 abstract "Diffractive optical elements offer a great way to control light beyond the capabilities of traditional refractivecomponents. Because of the very small feature sizes, the characterization of diffractive optical elements ischallenging. Using current invasive methods, such as scanning electron microscope (SEM) or atomic forcemicroscope (AFM), the measurements are slow and potentially destructive to the element. Employing opticalscatterometery, the measurements are not only fast and non-destructive but also integrable to inline controlof the fabrication and replication processes. In this work we use scatterometer to determine the dimensionalparameters of binary diffractive optical elements and compare the results with the parameters obtained withAFM and SEM." @default.
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- W1986988699 date "2014-08-27" @default.
- W1986988699 modified "2023-09-23" @default.
- W1986988699 title "Scatterometric characterization of diffractive optical elements" @default.
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- W1986988699 doi "https://doi.org/10.1117/12.2061699" @default.
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