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- W1986999575 abstract "Focused ion beam (FIB) technology is widely used for micromachining, which includes removal from and addition of material to a substrate with sub-micrometer beams. In order to maximize the rate at which micromachining is done it is necessary to use the highest feasible beam currents, which results in the ion beams being severely affected by spherical aberration. We have investigated the possibility of reducing the spherical aberration of a FIB focusing column by means of space charge, by introducing a negative space charge cloud into an einzel lens." @default.
- W1986999575 created "2016-06-24" @default.
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- W1986999575 date "1997-09-25" @default.
- W1986999575 modified "2023-10-07" @default.
- W1986999575 title "<title>Spherical aberration correction of a focused ion beam with space charge</title>" @default.
- W1986999575 doi "https://doi.org/10.1117/12.279398" @default.
- W1986999575 hasPublicationYear "1997" @default.
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