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• W1987017889 endingPage "21" @default.
• W1987017889 startingPage "15" @default.
• W1987017889 abstract "Interfacial reactions of Cu/Ta/Si multilayers after thermal treatment were investigated using transmission electron microscopy. The Cu and Ta films were deposited onto Si wafer by ionized metal plasma technique. The samples were then annealed at 400, 500, 550 and 600°C in purified Ar atmosphere for 30 min. The effect of oxygen in the atmosphere on the thermal stability is studied. An interlayer of Ta oxide was observed between Cu and Ta after annealing at 400, 500 and 550°C. It is evident that oxygen as residual gas from furnace ambient can diffuse through Cu grain boundaries to form the Ta oxide layer. After annealing at 600°C, Si reacted with Ta to form TaSi2 at the interface of Ta and Si, in the meantime Cu3Si with surrounding SiO2 formed in the Si substrate. The thermal stability of the Cu/Ta/Si samples was also examined in a two-step annealing treatment of 400°C for 30 min, followed by 600°C for 30 min. Even though interlayers of crystalline Ta–Cu oxide and Ta silicide were formed, Cu silicides were not observed. Formation of TaOx interlayer at the first stage of 400°C annealing may inhibit Cu diffusion into the Si substrate in the second stage of the 600°C annealing process." @default.
• W1987017889 created "2016-06-24" @default.
• W1987017889 creator A5002539490 @default.
• W1987017889 creator A5017123496 @default.
• W1987017889 creator A5017236574 @default.
• W1987017889 creator A5044418553 @default.
• W1987017889 creator A5048997744 @default.
• W1987017889 creator A5069849278 @default.
• W1987017889 creator A5081796558 @default.
• W1987017889 creator A5086636742 @default.
• W1987017889 creator A5089435992 @default.
• W1987017889 date "2001-06-01" @default.
• W1987017889 modified "2023-09-26" @default.
• W1987017889 title "The effect of oxygen in the annealing ambient on interfacial reactions of Cu/Ta/Si multilayers" @default.
• W1987017889 cites W1900220030 @default.
• W1987017889 cites W1973949113 @default.
• W1987017889 cites W1983406786 @default.
• W1987017889 cites W1997348162 @default.
• W1987017889 cites W1998521243 @default.
• W1987017889 cites W2003071700 @default.
• W1987017889 cites W2007551590 @default.
• W1987017889 cites W2008232629 @default.
• W1987017889 cites W2011652990 @default.
• W1987017889 cites W2011674556 @default.
• W1987017889 cites W2012373184 @default.
• W1987017889 cites W2022532131 @default.
• W1987017889 cites W2035253779 @default.
• W1987017889 cites W2037146063 @default.
• W1987017889 cites W2052619966 @default.
• W1987017889 cites W2057450161 @default.
• W1987017889 cites W2061800785 @default.
• W1987017889 cites W2062418534 @default.
• W1987017889 cites W2072494209 @default.
• W1987017889 cites W2078357119 @default.
• W1987017889 cites W2084645196 @default.
• W1987017889 cites W2086143050 @default.
• W1987017889 cites W2107078995 @default.
• W1987017889 cites W2498214626 @default.
• W1987017889 doi "https://doi.org/10.1016/s0040-6090(01)00780-5" @default.
• W1987017889 hasPublicationYear "2001" @default.
• W1987017889 type Work @default.
• W1987017889 sameAs 1987017889 @default.
• W1987017889 citedByCount "16" @default.
• W1987017889 countsByYear W19870178892013 @default.
• W1987017889 countsByYear W19870178892020 @default.
• W1987017889 countsByYear W19870178892022 @default.
• W1987017889 crossrefType "journal-article" @default.
• W1987017889 hasAuthorship W1987017889A5002539490 @default.
• W1987017889 hasAuthorship W1987017889A5017123496 @default.
• W1987017889 hasAuthorship W1987017889A5017236574 @default.
• W1987017889 hasAuthorship W1987017889A5044418553 @default.
• W1987017889 hasAuthorship W1987017889A5048997744 @default.
• W1987017889 hasAuthorship W1987017889A5069849278 @default.
• W1987017889 hasAuthorship W1987017889A5081796558 @default.
• W1987017889 hasAuthorship W1987017889A5086636742 @default.
• W1987017889 hasAuthorship W1987017889A5089435992 @default.
• W1987017889 hasConcept C113196181 @default.
• W1987017889 hasConcept C127413603 @default.
• W1987017889 hasConcept C146088050 @default.
• W1987017889 hasConcept C171250308 @default.
• W1987017889 hasConcept C178790620 @default.
• W1987017889 hasConcept C185592680 @default.
• W1987017889 hasConcept C191897082 @default.
• W1987017889 hasConcept C192562407 @default.
• W1987017889 hasConcept C2777855556 @default.
• W1987017889 hasConcept C2779851234 @default.
• W1987017889 hasConcept C2780901251 @default.
• W1987017889 hasConcept C42360764 @default.
• W1987017889 hasConcept C43617362 @default.
• W1987017889 hasConcept C514619126 @default.
• W1987017889 hasConcept C540031477 @default.
• W1987017889 hasConcept C544153396 @default.
• W1987017889 hasConcept C544956773 @default.
• W1987017889 hasConcept C59061564 @default.
• W1987017889 hasConceptScore W1987017889C113196181 @default.
• W1987017889 hasConceptScore W1987017889C127413603 @default.
• W1987017889 hasConceptScore W1987017889C146088050 @default.
• W1987017889 hasConceptScore W1987017889C171250308 @default.
• W1987017889 hasConceptScore W1987017889C178790620 @default.
• W1987017889 hasConceptScore W1987017889C185592680 @default.
• W1987017889 hasConceptScore W1987017889C191897082 @default.
• W1987017889 hasConceptScore W1987017889C192562407 @default.
• W1987017889 hasConceptScore W1987017889C2777855556 @default.
• W1987017889 hasConceptScore W1987017889C2779851234 @default.
• W1987017889 hasConceptScore W1987017889C2780901251 @default.
• W1987017889 hasConceptScore W1987017889C42360764 @default.
• W1987017889 hasConceptScore W1987017889C43617362 @default.
• W1987017889 hasConceptScore W1987017889C514619126 @default.
• W1987017889 hasConceptScore W1987017889C540031477 @default.
• W1987017889 hasConceptScore W1987017889C544153396 @default.
• W1987017889 hasConceptScore W1987017889C544956773 @default.
• W1987017889 hasConceptScore W1987017889C59061564 @default.
• W1987017889 hasIssue "1-2" @default.
• W1987017889 hasLocation W19870178891 @default.
• W1987017889 hasOpenAccess W1987017889 @default.
• W1987017889 hasPrimaryLocation W19870178891 @default.
• W1987017889 hasRelatedWork W1983043357 @default.
• W1987017889 hasRelatedWork W2021810307 @default.

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