Matches in SemOpenAlex for { <https://semopenalex.org/work/W1987069892> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W1987069892 abstract "Abstract Electron beam lithography was investigated using a cross-linkable polymer Langmuir–Blodgett (LB) film. Cross-linking reaction occurs in the LB film with electron beam irradiation as well as UV light irradiation and the irradiated LB film becomes insoluble in the organic solvents to form a two-dimensional network in the LB film. The sensitivity and contrast of the cross-linkable polymer LB film are 3 μC cm-2 and 0.64, respectively. The limiting resolution of patterning is 0.2 μm line-and-space. The electron beam lithography using the cross-linkable polymer LB film is applicable to the future nanotechnology." @default.
- W1987069892 created "2016-06-24" @default.
- W1987069892 creator A5034989664 @default.
- W1987069892 creator A5048969687 @default.
- W1987069892 creator A5072867701 @default.
- W1987069892 date "1998-07-01" @default.
- W1987069892 modified "2023-09-26" @default.
- W1987069892 title "Molecular patterning with a two-dimensional network polymer LB film 2: Drawing patterns by an electron beam" @default.
- W1987069892 doi "https://doi.org/10.1016/s0968-5677(98)00032-7" @default.
- W1987069892 hasPublicationYear "1998" @default.
- W1987069892 type Work @default.
- W1987069892 sameAs 1987069892 @default.
- W1987069892 citedByCount "4" @default.
- W1987069892 crossrefType "journal-article" @default.
- W1987069892 hasAuthorship W1987069892A5034989664 @default.
- W1987069892 hasAuthorship W1987069892A5048969687 @default.
- W1987069892 hasAuthorship W1987069892A5072867701 @default.
- W1987069892 hasConcept C105163801 @default.
- W1987069892 hasConcept C111337013 @default.
- W1987069892 hasConcept C120665830 @default.
- W1987069892 hasConcept C121332964 @default.
- W1987069892 hasConcept C147120987 @default.
- W1987069892 hasConcept C159985019 @default.
- W1987069892 hasConcept C171250308 @default.
- W1987069892 hasConcept C185544564 @default.
- W1987069892 hasConcept C192562407 @default.
- W1987069892 hasConcept C200274948 @default.
- W1987069892 hasConcept C204223013 @default.
- W1987069892 hasConcept C2779227376 @default.
- W1987069892 hasConcept C49040817 @default.
- W1987069892 hasConcept C521977710 @default.
- W1987069892 hasConcept C53524968 @default.
- W1987069892 hasConcept C62520636 @default.
- W1987069892 hasConcept C70520399 @default.
- W1987069892 hasConcept C95312477 @default.
- W1987069892 hasConceptScore W1987069892C105163801 @default.
- W1987069892 hasConceptScore W1987069892C111337013 @default.
- W1987069892 hasConceptScore W1987069892C120665830 @default.
- W1987069892 hasConceptScore W1987069892C121332964 @default.
- W1987069892 hasConceptScore W1987069892C147120987 @default.
- W1987069892 hasConceptScore W1987069892C159985019 @default.
- W1987069892 hasConceptScore W1987069892C171250308 @default.
- W1987069892 hasConceptScore W1987069892C185544564 @default.
- W1987069892 hasConceptScore W1987069892C192562407 @default.
- W1987069892 hasConceptScore W1987069892C200274948 @default.
- W1987069892 hasConceptScore W1987069892C204223013 @default.
- W1987069892 hasConceptScore W1987069892C2779227376 @default.
- W1987069892 hasConceptScore W1987069892C49040817 @default.
- W1987069892 hasConceptScore W1987069892C521977710 @default.
- W1987069892 hasConceptScore W1987069892C53524968 @default.
- W1987069892 hasConceptScore W1987069892C62520636 @default.
- W1987069892 hasConceptScore W1987069892C70520399 @default.
- W1987069892 hasConceptScore W1987069892C95312477 @default.
- W1987069892 hasLocation W19870698921 @default.
- W1987069892 hasOpenAccess W1987069892 @default.
- W1987069892 hasPrimaryLocation W19870698921 @default.
- W1987069892 hasRelatedWork W1964961204 @default.
- W1987069892 hasRelatedWork W1983973861 @default.
- W1987069892 hasRelatedWork W1995640704 @default.
- W1987069892 hasRelatedWork W1998856642 @default.
- W1987069892 hasRelatedWork W2011977201 @default.
- W1987069892 hasRelatedWork W2019498885 @default.
- W1987069892 hasRelatedWork W2027672859 @default.
- W1987069892 hasRelatedWork W2028870692 @default.
- W1987069892 hasRelatedWork W2033744340 @default.
- W1987069892 hasRelatedWork W2039222703 @default.
- W1987069892 hasRelatedWork W2049464279 @default.
- W1987069892 hasRelatedWork W2075926935 @default.
- W1987069892 hasRelatedWork W2075988915 @default.
- W1987069892 hasRelatedWork W2085379684 @default.
- W1987069892 hasRelatedWork W2090814266 @default.
- W1987069892 hasRelatedWork W2160949724 @default.
- W1987069892 hasRelatedWork W2276025613 @default.
- W1987069892 hasRelatedWork W2467712509 @default.
- W1987069892 hasRelatedWork W1987939255 @default.
- W1987069892 hasRelatedWork W1998044602 @default.
- W1987069892 isParatext "false" @default.
- W1987069892 isRetracted "false" @default.
- W1987069892 magId "1987069892" @default.
- W1987069892 workType "article" @default.