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- W1987134736 abstract "We have developed a numerical algorithm that, applied to extreme ultraviolet (EUV) micrographs, allows for the simultaneous determination of the spatial resolution and the size of the features of the image. The validity of the method was evaluated by analyzing EUV images." @default.
- W1987134736 created "2016-06-24" @default.
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- W1987134736 date "2008-11-01" @default.
- W1987134736 modified "2023-09-27" @default.
- W1987134736 title "Spatial resolution and feature size determination in extreme ultraviolet microscope images" @default.
- W1987134736 cites W2032141514 @default.
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- W1987134736 doi "https://doi.org/10.1109/leos.2008.4688877" @default.
- W1987134736 hasPublicationYear "2008" @default.
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