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- W1987155100 abstract "The Fraunhofer Institute for Microelectronic Circuits and Systems (FhG-IMS) has developed spatial light modulators (SLM), which are used in a pattern generator for DUV laser mask writing developed by Micronic Laser Systems. They consist of micromirror arrays and allow massive parallel writing in UV mask writers. The chip discussed here consists of 2048 × 512 individually addressable mirrors and can be run at a frame rate of 1 to 2 kHz. For this application it is necessary that the SLMs can be operated under DUV light without changing their performance. This paper discusses a failure mechanism of the SLMs when operated in DUV light and countermeasures to eliminate this effect." @default.
- W1987155100 created "2016-06-24" @default.
- W1987155100 creator A5010478189 @default.
- W1987155100 creator A5043878019 @default.
- W1987155100 creator A5047623456 @default.
- W1987155100 creator A5050019047 @default.
- W1987155100 creator A5051710399 @default.
- W1987155100 creator A5070260701 @default.
- W1987155100 creator A5003512248 @default.
- W1987155100 date "2003-01-20" @default.
- W1987155100 modified "2023-09-23" @default.
- W1987155100 title "Operation of spatial light modulators in DUV light" @default.
- W1987155100 cites W2059622818 @default.
- W1987155100 cites W2173503348 @default.
- W1987155100 doi "https://doi.org/10.1117/12.477805" @default.
- W1987155100 hasPublicationYear "2003" @default.
- W1987155100 type Work @default.
- W1987155100 sameAs 1987155100 @default.
- W1987155100 citedByCount "5" @default.
- W1987155100 countsByYear W19871551002012 @default.
- W1987155100 countsByYear W19871551002021 @default.
- W1987155100 crossrefType "proceedings-article" @default.
- W1987155100 hasAuthorship W1987155100A5003512248 @default.
- W1987155100 hasAuthorship W1987155100A5010478189 @default.
- W1987155100 hasAuthorship W1987155100A5043878019 @default.
- W1987155100 hasAuthorship W1987155100A5047623456 @default.
- W1987155100 hasAuthorship W1987155100A5050019047 @default.
- W1987155100 hasAuthorship W1987155100A5051710399 @default.
- W1987155100 hasAuthorship W1987155100A5070260701 @default.
- W1987155100 hasConcept C119599485 @default.
- W1987155100 hasConcept C120665830 @default.
- W1987155100 hasConcept C121332964 @default.
- W1987155100 hasConcept C126042441 @default.
- W1987155100 hasConcept C127413603 @default.
- W1987155100 hasConcept C13274807 @default.
- W1987155100 hasConcept C134146338 @default.
- W1987155100 hasConcept C163258240 @default.
- W1987155100 hasConcept C165005293 @default.
- W1987155100 hasConcept C187937830 @default.
- W1987155100 hasConcept C192562407 @default.
- W1987155100 hasConcept C2777903624 @default.
- W1987155100 hasConcept C2780992000 @default.
- W1987155100 hasConcept C41008148 @default.
- W1987155100 hasConcept C42207441 @default.
- W1987155100 hasConcept C49040817 @default.
- W1987155100 hasConcept C520434653 @default.
- W1987155100 hasConcept C62520636 @default.
- W1987155100 hasConcept C76155785 @default.
- W1987155100 hasConceptScore W1987155100C119599485 @default.
- W1987155100 hasConceptScore W1987155100C120665830 @default.
- W1987155100 hasConceptScore W1987155100C121332964 @default.
- W1987155100 hasConceptScore W1987155100C126042441 @default.
- W1987155100 hasConceptScore W1987155100C127413603 @default.
- W1987155100 hasConceptScore W1987155100C13274807 @default.
- W1987155100 hasConceptScore W1987155100C134146338 @default.
- W1987155100 hasConceptScore W1987155100C163258240 @default.
- W1987155100 hasConceptScore W1987155100C165005293 @default.
- W1987155100 hasConceptScore W1987155100C187937830 @default.
- W1987155100 hasConceptScore W1987155100C192562407 @default.
- W1987155100 hasConceptScore W1987155100C2777903624 @default.
- W1987155100 hasConceptScore W1987155100C2780992000 @default.
- W1987155100 hasConceptScore W1987155100C41008148 @default.
- W1987155100 hasConceptScore W1987155100C42207441 @default.
- W1987155100 hasConceptScore W1987155100C49040817 @default.
- W1987155100 hasConceptScore W1987155100C520434653 @default.
- W1987155100 hasConceptScore W1987155100C62520636 @default.
- W1987155100 hasConceptScore W1987155100C76155785 @default.
- W1987155100 hasLocation W19871551001 @default.
- W1987155100 hasOpenAccess W1987155100 @default.
- W1987155100 hasPrimaryLocation W19871551001 @default.
- W1987155100 hasRelatedWork W2015731672 @default.
- W1987155100 hasRelatedWork W2030608027 @default.
- W1987155100 hasRelatedWork W2037017673 @default.
- W1987155100 hasRelatedWork W2748266058 @default.
- W1987155100 hasRelatedWork W2928720736 @default.
- W1987155100 hasRelatedWork W2939621270 @default.
- W1987155100 hasRelatedWork W2946118682 @default.
- W1987155100 hasRelatedWork W3047352486 @default.
- W1987155100 hasRelatedWork W3099325532 @default.
- W1987155100 hasRelatedWork W2209721021 @default.
- W1987155100 isParatext "false" @default.
- W1987155100 isRetracted "false" @default.
- W1987155100 magId "1987155100" @default.
- W1987155100 workType "article" @default.