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- W1987178575 abstract "We used high-resolution transmission electron microscopy to show that the atomic structures at a Si3N4/Si interface are clearly different from those at a SiO2/Si interface. Using first-principles calculations, we also found that, in one of the observed N-induced interfacial geometries, a dangling bond was produced on a Si atom adjacent to a N atom. We thus argue that such N-induced interfacial dangling bonds can cause degradation in the performance of metal–oxide–semiconductor transistors with Si–oxynitride (SiON) gate dielectrics when the N concentration is increased at the SiON/Si interfaces. We also argue that the difference in flatness between Si3N4 and SiON/Si interfaces and SiO2/Si interfaces is the result of the difference between their atomic structures." @default.
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- W1987178575 date "2001-09-15" @default.
- W1987178575 modified "2023-09-24" @default.
- W1987178575 title "Atomic structures at a Si–nitride/Si(001) interface" @default.
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- W1987178575 doi "https://doi.org/10.1063/1.1389759" @default.
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