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- W1987218489 abstract "Crystallization of 1500 Å polycrystalline silicon films self-implanted at doses of 2×1015–6×1015 ions/cm2 is investigated. For doses of 2×1015–5×1015 ions/cm2, crystallization is due to the growth of crystallites which nucleate at a rate which decreases with increasing dose. Above 5×1015 ions/cm2, the nucleation rate is comparable to that of amorphous silicon, though a transient time is observed during which little or no nucleation occurs. The growth velocity does not appear to be dose dependent." @default.
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- W1987218489 date "1988-02-22" @default.
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- W1987218489 title "Dose dependence of crystallization in implanted polycrystalline silicon films on SiO<sub>2</sub>" @default.
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- W1987218489 doi "https://doi.org/10.1063/1.99392" @default.
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