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- W1987228085 endingPage "233" @default.
- W1987228085 startingPage "228" @default.
- W1987228085 abstract "Thermal desorption spectroscopy (TDS) has been commonly employed to evaluate the outgassing properties of both vacuum materials and thin films. Hydrogen, water, CO and CO2 —the most dominant gas species— can be easily detected and quantified by quadrupole mass spectrometry. This paper examines two calibration methods to convert ion current into outgassing rate: first, by using the standard leak of each gas and, second, by using an absolute pressure gauge. TDS is demonstrated for two different types of samples: stainless steel and amorphous Si (a-Si) film. In the case of stainless steel, samples blasted with glass beads were compared with chemically polished samples, and the TDS results' relationship to pumping down properties was investigated. The a-Si film examined was formed using a low temperature poly silicon process. Its hydrogen concentration as determined by TDS corresponded with that obtained by secondary ion mass spectrometry (SIMS). The outgassing temperature characteristics obtained for both the stainless steel and a-Si samples provided valuable information." @default.
- W1987228085 created "2016-06-24" @default.
- W1987228085 creator A5037183619 @default.
- W1987228085 date "2007-01-01" @default.
- W1987228085 modified "2023-10-17" @default.
- W1987228085 title "Analysis of Desorbed Gases from Surface: Thermal Desorption Spectroscopy" @default.
- W1987228085 cites W1998395854 @default.
- W1987228085 cites W2001108578 @default.
- W1987228085 cites W2051050740 @default.
- W1987228085 cites W2057363862 @default.
- W1987228085 cites W2072150903 @default.
- W1987228085 cites W2088019349 @default.
- W1987228085 cites W2313956180 @default.
- W1987228085 cites W2316595795 @default.
- W1987228085 cites W2317415364 @default.
- W1987228085 cites W2317777636 @default.
- W1987228085 cites W2329091159 @default.
- W1987228085 cites W3122957633 @default.
- W1987228085 doi "https://doi.org/10.3131/jvsj.50.228" @default.
- W1987228085 hasPublicationYear "2007" @default.
- W1987228085 type Work @default.
- W1987228085 sameAs 1987228085 @default.
- W1987228085 citedByCount "2" @default.
- W1987228085 countsByYear W19872280852012 @default.
- W1987228085 countsByYear W19872280852019 @default.
- W1987228085 crossrefType "journal-article" @default.
- W1987228085 hasAuthorship W1987228085A5037183619 @default.
- W1987228085 hasBestOaLocation W19872280851 @default.
- W1987228085 hasConcept C1012414 @default.
- W1987228085 hasConcept C103232671 @default.
- W1987228085 hasConcept C113196181 @default.
- W1987228085 hasConcept C121332964 @default.
- W1987228085 hasConcept C150394285 @default.
- W1987228085 hasConcept C155916967 @default.
- W1987228085 hasConcept C162356407 @default.
- W1987228085 hasConcept C162711632 @default.
- W1987228085 hasConcept C171250308 @default.
- W1987228085 hasConcept C178790620 @default.
- W1987228085 hasConcept C185592680 @default.
- W1987228085 hasConcept C191897082 @default.
- W1987228085 hasConcept C192562407 @default.
- W1987228085 hasConcept C2781059571 @default.
- W1987228085 hasConcept C32891209 @default.
- W1987228085 hasConcept C43617362 @default.
- W1987228085 hasConcept C512968161 @default.
- W1987228085 hasConcept C544956773 @default.
- W1987228085 hasConcept C62520636 @default.
- W1987228085 hasConcept C77671233 @default.
- W1987228085 hasConcept C82225425 @default.
- W1987228085 hasConceptScore W1987228085C1012414 @default.
- W1987228085 hasConceptScore W1987228085C103232671 @default.
- W1987228085 hasConceptScore W1987228085C113196181 @default.
- W1987228085 hasConceptScore W1987228085C121332964 @default.
- W1987228085 hasConceptScore W1987228085C150394285 @default.
- W1987228085 hasConceptScore W1987228085C155916967 @default.
- W1987228085 hasConceptScore W1987228085C162356407 @default.
- W1987228085 hasConceptScore W1987228085C162711632 @default.
- W1987228085 hasConceptScore W1987228085C171250308 @default.
- W1987228085 hasConceptScore W1987228085C178790620 @default.
- W1987228085 hasConceptScore W1987228085C185592680 @default.
- W1987228085 hasConceptScore W1987228085C191897082 @default.
- W1987228085 hasConceptScore W1987228085C192562407 @default.
- W1987228085 hasConceptScore W1987228085C2781059571 @default.
- W1987228085 hasConceptScore W1987228085C32891209 @default.
- W1987228085 hasConceptScore W1987228085C43617362 @default.
- W1987228085 hasConceptScore W1987228085C512968161 @default.
- W1987228085 hasConceptScore W1987228085C544956773 @default.
- W1987228085 hasConceptScore W1987228085C62520636 @default.
- W1987228085 hasConceptScore W1987228085C77671233 @default.
- W1987228085 hasConceptScore W1987228085C82225425 @default.
- W1987228085 hasIssue "4" @default.
- W1987228085 hasLocation W19872280851 @default.
- W1987228085 hasOpenAccess W1987228085 @default.
- W1987228085 hasPrimaryLocation W19872280851 @default.
- W1987228085 hasRelatedWork W1966850573 @default.
- W1987228085 hasRelatedWork W1980952616 @default.
- W1987228085 hasRelatedWork W1987228085 @default.
- W1987228085 hasRelatedWork W2002210549 @default.
- W1987228085 hasRelatedWork W2020503543 @default.
- W1987228085 hasRelatedWork W2038760622 @default.
- W1987228085 hasRelatedWork W2051498666 @default.
- W1987228085 hasRelatedWork W2066895025 @default.
- W1987228085 hasRelatedWork W4200086419 @default.
- W1987228085 hasRelatedWork W4238731174 @default.
- W1987228085 hasVolume "50" @default.
- W1987228085 isParatext "false" @default.
- W1987228085 isRetracted "false" @default.
- W1987228085 magId "1987228085" @default.
- W1987228085 workType "article" @default.