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- W1987238697 abstract "Expert systems for photolithography or photolithography-related domains are being built by many semiconductor chip manufacturers, fabrication equipment manufacturers, and university groups. This paper describes several such applications for process control, diagnosis, automation, design, simulation, planning, and scheduling. Benefits and implementation issues are highlighted." @default.
- W1987238697 created "2016-06-24" @default.
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- W1987238697 date "1987-04-17" @default.
- W1987238697 modified "2023-10-14" @default.
- W1987238697 title "Use Of Expert Systems In Photolithography" @default.
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- W1987238697 doi "https://doi.org/10.1117/12.940438" @default.
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