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- W1987271856 abstract "In this paper, we report a comparative study of different double gate architectures. The main focus is on the fabrication method of two different device concepts developed in our group. The first is a planar version with special SOI wafers or deposited films and the second is a vertical transistor with lithography independent channel length. In addition to a thorough structural analysis we present electrical characteristics of the fabricated devices." @default.
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- W1987271856 date "2002-07-01" @default.
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- W1987271856 title "Planar and vertical double gate concepts" @default.
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- W1987271856 doi "https://doi.org/10.1016/s0038-1101(02)00031-x" @default.
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