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- W1987332010 abstract "This letter describes a multilayer structure which has successfully been used for recrystallization of thin polycrystalline silicon films on silicon dioxide, preventing at the same time the formation of thermal misfit dislocations in the underlying silicon substrate. A CO 2 laser beam having a round spot with a Gaussian intensity distribution was used in the zone-melting process which resulted in a simultaneous recrystallization of two levels of polysilicon. The lower silicon film is of good crystalline quality and of significantly improved flatness." @default.
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- W1987332010 date "1988-10-01" @default.
- W1987332010 modified "2023-09-23" @default.
- W1987332010 title "Substrate Damage Prevention and Simultaneous ZMR in Stacked SOI Layers" @default.
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- W1987332010 doi "https://doi.org/10.1143/jjap.27.l1938" @default.
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