FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1987358011> ?p ?o ?g. }

• W1987358011 endingPage "1321" @default.
• W1987358011 startingPage "1321" @default.
• W1987358011 abstract "Ta thin films were grown on Si(001) and polycrystalline Si substrates by plasma-enhanced atomic-layer deposition (PE-ALD) using TaCl5 and atomic hydrogen as precursors. The grown films have resistivity of 150–180 μm cm with a small Cl concentration between 0.5 and 2 at. %. The diffusion barrier properties were investigated using bilayer structures consisting of 200 nm Cu deposited by sputtering on ALD Ta films with various thicknesses. Three in situ analysis techniques consisting of x-ray diffraction, elastic light scattering, and resistance analysis were used to determine the diffusion barrier failure temperature of Ta films. The barriers were annealed at a temperature ramp rate of 3 °C/s from 100 to 1000 °C in forming gas. For this method using x-ray diffraction, the barrier failure temperatures were determined by monitoring the disappearance of the Cu(111) x-ray diffraction peak and appearance of Cu silicide diffraction peaks. At the diffusion barrier failure temperature, elastic light scattering indicated a rapid increase in surface roughness, and concurrent increases in sheet resistance of the blanket Cu/ALD Ta films on polycrystalline Si were monitored using a four-point-probe technique. The same analyses were performed on bilayer structures of Cu/physical-vapor-deposition Ta films with comparable thicknesses. The ALD Ta barrier films show significantly higher failure temperatures compared to PVD Ta; at least 70 °C at comparable thicknesses, which is thought to be due to the uniform, smooth surface and amorphous or nanocrystalline microstructure of ALD Ta." @default.
• W1987358011 created "2016-06-24" @default.
• W1987358011 creator A5007738825 @default.
• W1987358011 creator A5014719136 @default.
• W1987358011 creator A5073271056 @default.
• W1987358011 creator A5079036985 @default.
• W1987358011 date "2002-01-01" @default.
• W1987358011 modified "2023-10-13" @default.
• W1987358011 title "Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition" @default.
• W1987358011 cites W1967717954 @default.
• W1987358011 cites W1979379033 @default.
• W1987358011 cites W1982442231 @default.
• W1987358011 cites W1983406786 @default.
• W1987358011 cites W2008073477 @default.
• W1987358011 cites W2009739716 @default.
• W1987358011 cites W2022622420 @default.
• W1987358011 cites W2026965293 @default.
• W1987358011 cites W2028606097 @default.
• W1987358011 cites W2058838733 @default.
• W1987358011 cites W2065451291 @default.
• W1987358011 cites W2077461818 @default.
• W1987358011 cites W2082115499 @default.
• W1987358011 cites W2086143050 @default.
• W1987358011 cites W2092204999 @default.
• W1987358011 cites W2095284351 @default.
• W1987358011 cites W2147193158 @default.
• W1987358011 cites W2318292605 @default.
• W1987358011 doi "https://doi.org/10.1116/1.1486233" @default.
• W1987358011 hasPublicationYear "2002" @default.
• W1987358011 type Work @default.
• W1987358011 sameAs 1987358011 @default.
• W1987358011 citedByCount "112" @default.
• W1987358011 countsByYear W19873580112012 @default.
• W1987358011 countsByYear W19873580112013 @default.
• W1987358011 countsByYear W19873580112014 @default.
• W1987358011 countsByYear W19873580112015 @default.
• W1987358011 countsByYear W19873580112016 @default.
• W1987358011 countsByYear W19873580112017 @default.
• W1987358011 countsByYear W19873580112018 @default.
• W1987358011 countsByYear W19873580112020 @default.
• W1987358011 countsByYear W19873580112021 @default.
• W1987358011 countsByYear W19873580112022 @default.
• W1987358011 countsByYear W19873580112023 @default.
• W1987358011 crossrefType "journal-article" @default.
• W1987358011 hasAuthorship W1987358011A5007738825 @default.
• W1987358011 hasAuthorship W1987358011A5014719136 @default.
• W1987358011 hasAuthorship W1987358011A5073271056 @default.
• W1987358011 hasAuthorship W1987358011A5079036985 @default.
• W1987358011 hasBestOaLocation W19873580111 @default.
• W1987358011 hasConcept C107365816 @default.
• W1987358011 hasConcept C113196181 @default.
• W1987358011 hasConcept C137637335 @default.
• W1987358011 hasConcept C140676511 @default.
• W1987358011 hasConcept C159985019 @default.
• W1987358011 hasConcept C171250308 @default.
• W1987358011 hasConcept C185592680 @default.
• W1987358011 hasConcept C19067145 @default.
• W1987358011 hasConcept C191897082 @default.
• W1987358011 hasConcept C192157962 @default.
• W1987358011 hasConcept C192562407 @default.
• W1987358011 hasConcept C2778836790 @default.
• W1987358011 hasConcept C2779227376 @default.
• W1987358011 hasConcept C2779833192 @default.
• W1987358011 hasConcept C41625074 @default.
• W1987358011 hasConcept C43617362 @default.
• W1987358011 hasConcept C55493867 @default.
• W1987358011 hasConcept C56052488 @default.
• W1987358011 hasConcept C66825105 @default.
• W1987358011 hasConcept C69544855 @default.
• W1987358011 hasConcept C8010536 @default.
• W1987358011 hasConcept C87976508 @default.
• W1987358011 hasConceptScore W1987358011C107365816 @default.
• W1987358011 hasConceptScore W1987358011C113196181 @default.
• W1987358011 hasConceptScore W1987358011C137637335 @default.
• W1987358011 hasConceptScore W1987358011C140676511 @default.
• W1987358011 hasConceptScore W1987358011C159985019 @default.
• W1987358011 hasConceptScore W1987358011C171250308 @default.
• W1987358011 hasConceptScore W1987358011C185592680 @default.
• W1987358011 hasConceptScore W1987358011C19067145 @default.
• W1987358011 hasConceptScore W1987358011C191897082 @default.
• W1987358011 hasConceptScore W1987358011C192157962 @default.
• W1987358011 hasConceptScore W1987358011C192562407 @default.
• W1987358011 hasConceptScore W1987358011C2778836790 @default.
• W1987358011 hasConceptScore W1987358011C2779227376 @default.
• W1987358011 hasConceptScore W1987358011C2779833192 @default.
• W1987358011 hasConceptScore W1987358011C41625074 @default.
• W1987358011 hasConceptScore W1987358011C43617362 @default.
• W1987358011 hasConceptScore W1987358011C55493867 @default.
• W1987358011 hasConceptScore W1987358011C56052488 @default.
• W1987358011 hasConceptScore W1987358011C66825105 @default.
• W1987358011 hasConceptScore W1987358011C69544855 @default.
• W1987358011 hasConceptScore W1987358011C8010536 @default.
• W1987358011 hasConceptScore W1987358011C87976508 @default.
• W1987358011 hasIssue "4" @default.
• W1987358011 hasLocation W19873580111 @default.
• W1987358011 hasOpenAccess W1987358011 @default.
• W1987358011 hasPrimaryLocation W19873580111 @default.
• W1987358011 hasRelatedWork W1966800404 @default.

• next