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- W1987472001 abstract "The rate of deposition of tungsten on quartz was determined with the aim of clarifying the mechanism of losing the selectivity of tungsten deposition on Si/SiO/sub 2/ substrates. The gaseous species above a quartz substrate proceeding during the deposition reaction were identified by the use of a mass spectrometer." @default.
- W1987472001 created "2016-06-24" @default.
- W1987472001 creator A5007935491 @default.
- W1987472001 creator A5027049730 @default.
- W1987472001 date "1988-12-01" @default.
- W1987472001 modified "2023-09-26" @default.
- W1987472001 title "Tungsten Deposition on Quartz by the Reaction of WF 6 and Hydrogen" @default.
- W1987472001 doi "https://doi.org/10.1149/1.2095523" @default.
- W1987472001 hasPublicationYear "1988" @default.
- W1987472001 type Work @default.
- W1987472001 sameAs 1987472001 @default.
- W1987472001 citedByCount "3" @default.
- W1987472001 crossrefType "journal-article" @default.
- W1987472001 hasAuthorship W1987472001A5007935491 @default.
- W1987472001 hasAuthorship W1987472001A5027049730 @default.
- W1987472001 hasConcept C107872376 @default.
- W1987472001 hasConcept C111368507 @default.
- W1987472001 hasConcept C113196181 @default.
- W1987472001 hasConcept C118792377 @default.
- W1987472001 hasConcept C127313418 @default.
- W1987472001 hasConcept C127413603 @default.
- W1987472001 hasConcept C151730666 @default.
- W1987472001 hasConcept C161790260 @default.
- W1987472001 hasConcept C178790620 @default.
- W1987472001 hasConcept C179104552 @default.
- W1987472001 hasConcept C185592680 @default.
- W1987472001 hasConcept C191897082 @default.
- W1987472001 hasConcept C192562407 @default.
- W1987472001 hasConcept C2777289219 @default.
- W1987472001 hasConcept C2779870107 @default.
- W1987472001 hasConcept C2816523 @default.
- W1987472001 hasConcept C42360764 @default.
- W1987472001 hasConcept C512968161 @default.
- W1987472001 hasConcept C542268612 @default.
- W1987472001 hasConcept C64297162 @default.
- W1987472001 hasConceptScore W1987472001C107872376 @default.
- W1987472001 hasConceptScore W1987472001C111368507 @default.
- W1987472001 hasConceptScore W1987472001C113196181 @default.
- W1987472001 hasConceptScore W1987472001C118792377 @default.
- W1987472001 hasConceptScore W1987472001C127313418 @default.
- W1987472001 hasConceptScore W1987472001C127413603 @default.
- W1987472001 hasConceptScore W1987472001C151730666 @default.
- W1987472001 hasConceptScore W1987472001C161790260 @default.
- W1987472001 hasConceptScore W1987472001C178790620 @default.
- W1987472001 hasConceptScore W1987472001C179104552 @default.
- W1987472001 hasConceptScore W1987472001C185592680 @default.
- W1987472001 hasConceptScore W1987472001C191897082 @default.
- W1987472001 hasConceptScore W1987472001C192562407 @default.
- W1987472001 hasConceptScore W1987472001C2777289219 @default.
- W1987472001 hasConceptScore W1987472001C2779870107 @default.
- W1987472001 hasConceptScore W1987472001C2816523 @default.
- W1987472001 hasConceptScore W1987472001C42360764 @default.
- W1987472001 hasConceptScore W1987472001C512968161 @default.
- W1987472001 hasConceptScore W1987472001C542268612 @default.
- W1987472001 hasConceptScore W1987472001C64297162 @default.
- W1987472001 hasLocation W19874720011 @default.
- W1987472001 hasOpenAccess W1987472001 @default.
- W1987472001 hasPrimaryLocation W19874720011 @default.
- W1987472001 hasRelatedWork W1487948901 @default.
- W1987472001 hasRelatedWork W1806448843 @default.
- W1987472001 hasRelatedWork W1866959647 @default.
- W1987472001 hasRelatedWork W1970468670 @default.
- W1987472001 hasRelatedWork W1973650395 @default.
- W1987472001 hasRelatedWork W1978578732 @default.
- W1987472001 hasRelatedWork W1996407699 @default.
- W1987472001 hasRelatedWork W1998548533 @default.
- W1987472001 hasRelatedWork W2003502359 @default.
- W1987472001 hasRelatedWork W2019643621 @default.
- W1987472001 hasRelatedWork W2022180449 @default.
- W1987472001 hasRelatedWork W2029017140 @default.
- W1987472001 hasRelatedWork W2052143411 @default.
- W1987472001 hasRelatedWork W2057956290 @default.
- W1987472001 hasRelatedWork W2071348997 @default.
- W1987472001 hasRelatedWork W2084230469 @default.
- W1987472001 hasRelatedWork W2094620741 @default.
- W1987472001 hasRelatedWork W2181292386 @default.
- W1987472001 hasRelatedWork W90919705 @default.
- W1987472001 hasRelatedWork W2135173386 @default.
- W1987472001 isParatext "false" @default.
- W1987472001 isRetracted "false" @default.
- W1987472001 magId "1987472001" @default.
- W1987472001 workType "article" @default.