FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1987480013> ?p ?o ?g. }

• W1987480013 endingPage "08HB01" @default.
• W1987480013 startingPage "08HB01" @default.
• W1987480013 abstract "In reactive ion etching (RIE) processes of vertical metal oxide semiconductor (MOS) devices, damages caused by ion bombardment at oblique incidence may affect the device performance. In this study, damage formation on Si surfaces by energetic hydrogen and halogen ions has been examined for different angles of incidence with the use of a multi-beam system. The beam experiments and molecular dynamics simulations have shown that the depth of a Si damage layer caused by H + ion injections has weak dependence on the angle of incidence. It is also found experimentally that the Cl + or Br + ion etching yield of a Si substrate that is damaged by energetic hydrogen ions prior to Cl + or Br + ion injections is essentially the same as that of the undamaged Si substrate. The results indicate that, in the etching process of vertical MOS gate structures, surface bombardment by energetic hydrogen ions even at oblique incidence may cause several-nanometer deep damages to the Si channels but etching yields for the gate fabrication are unlikely to be altered by the surface damages." @default.
• W1987480013 created "2016-06-24" @default.
• W1987480013 creator A5045110218 @default.
• W1987480013 creator A5066675811 @default.
• W1987480013 creator A5073850979 @default.
• W1987480013 creator A5074765078 @default.
• W1987480013 creator A5083634289 @default.
• W1987480013 creator A5084561805 @default.
• W1987480013 creator A5090349327 @default.
• W1987480013 date "2012-08-01" @default.
• W1987480013 modified "2023-10-08" @default.
• W1987480013 title "Si Damage Due to Oblique-Angle Ion Impact Relevant for Vertical Gate Etching Processes" @default.
• W1987480013 cites W1541821939 @default.
• W1987480013 cites W1614065399 @default.
• W1987480013 cites W1964560403 @default.
• W1987480013 cites W1967870557 @default.
• W1987480013 cites W1977046564 @default.
• W1987480013 cites W1986926667 @default.
• W1987480013 cites W1992083355 @default.
• W1987480013 cites W2000928345 @default.
• W1987480013 cites W2004249049 @default.
• W1987480013 cites W2005398838 @default.
• W1987480013 cites W2008653273 @default.
• W1987480013 cites W2009865965 @default.
• W1987480013 cites W2011977039 @default.
• W1987480013 cites W2015281517 @default.
• W1987480013 cites W2025023225 @default.
• W1987480013 cites W2037782625 @default.
• W1987480013 cites W2060732010 @default.
• W1987480013 cites W2068154752 @default.
• W1987480013 cites W2077862991 @default.
• W1987480013 cites W2079364365 @default.
• W1987480013 cites W2083877606 @default.
• W1987480013 cites W2093647584 @default.
• W1987480013 cites W2106350280 @default.
• W1987480013 cites W2113361072 @default.
• W1987480013 cites W2127212879 @default.
• W1987480013 cites W2145952891 @default.
• W1987480013 doi "https://doi.org/10.1143/jjap.51.08hb01" @default.
• W1987480013 hasPublicationYear "2012" @default.
• W1987480013 type Work @default.
• W1987480013 sameAs 1987480013 @default.
• W1987480013 citedByCount "8" @default.
• W1987480013 countsByYear W19874800132013 @default.
• W1987480013 countsByYear W19874800132015 @default.
• W1987480013 countsByYear W19874800132021 @default.
• W1987480013 countsByYear W19874800132022 @default.
• W1987480013 countsByYear W19874800132023 @default.
• W1987480013 crossrefType "journal-article" @default.
• W1987480013 hasAuthorship W1987480013A5045110218 @default.
• W1987480013 hasAuthorship W1987480013A5066675811 @default.
• W1987480013 hasAuthorship W1987480013A5073850979 @default.
• W1987480013 hasAuthorship W1987480013A5074765078 @default.
• W1987480013 hasAuthorship W1987480013A5083634289 @default.
• W1987480013 hasAuthorship W1987480013A5084561805 @default.
• W1987480013 hasAuthorship W1987480013A5090349327 @default.
• W1987480013 hasConcept C100460472 @default.
• W1987480013 hasConcept C111368507 @default.
• W1987480013 hasConcept C121332964 @default.
• W1987480013 hasConcept C127313418 @default.
• W1987480013 hasConcept C136525101 @default.
• W1987480013 hasConcept C142724271 @default.
• W1987480013 hasConcept C145148216 @default.
• W1987480013 hasConcept C159985019 @default.
• W1987480013 hasConcept C165801399 @default.
• W1987480013 hasConcept C171250308 @default.
• W1987480013 hasConcept C172385210 @default.
• W1987480013 hasConcept C178790620 @default.
• W1987480013 hasConcept C185592680 @default.
• W1987480013 hasConcept C192562407 @default.
• W1987480013 hasConcept C204787440 @default.
• W1987480013 hasConcept C2361726 @default.
• W1987480013 hasConcept C2777289219 @default.
• W1987480013 hasConcept C2779227376 @default.
• W1987480013 hasConcept C33220542 @default.
• W1987480013 hasConcept C50774322 @default.
• W1987480013 hasConcept C512968161 @default.
• W1987480013 hasConcept C62520636 @default.
• W1987480013 hasConcept C71924100 @default.
• W1987480013 hasConcept C77066764 @default.
• W1987480013 hasConceptScore W1987480013C100460472 @default.
• W1987480013 hasConceptScore W1987480013C111368507 @default.
• W1987480013 hasConceptScore W1987480013C121332964 @default.
• W1987480013 hasConceptScore W1987480013C127313418 @default.
• W1987480013 hasConceptScore W1987480013C136525101 @default.
• W1987480013 hasConceptScore W1987480013C142724271 @default.
• W1987480013 hasConceptScore W1987480013C145148216 @default.
• W1987480013 hasConceptScore W1987480013C159985019 @default.
• W1987480013 hasConceptScore W1987480013C165801399 @default.
• W1987480013 hasConceptScore W1987480013C171250308 @default.
• W1987480013 hasConceptScore W1987480013C172385210 @default.
• W1987480013 hasConceptScore W1987480013C178790620 @default.
• W1987480013 hasConceptScore W1987480013C185592680 @default.
• W1987480013 hasConceptScore W1987480013C192562407 @default.
• W1987480013 hasConceptScore W1987480013C204787440 @default.
• W1987480013 hasConceptScore W1987480013C2361726 @default.
• W1987480013 hasConceptScore W1987480013C2777289219 @default.
• W1987480013 hasConceptScore W1987480013C2779227376 @default.

• next