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- W1987502875 abstract "Zinc oxide (ZnO) is a promising electronic material for transparent electronic applications including thin-film sensors, transistors and solar cells. In this work, we investigated the influence of direct current (DC) magnetron sputtering process parameter on ZnO films using scanning electron microscopy (SEM). The experimental results reveal an enhancement of the structural properties with increasing argon (Ar) pressure. The influence of the Ar pressure will be discussed in this paper." @default.
- W1987502875 created "2016-06-24" @default.
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- W1987502875 date "2011-10-01" @default.
- W1987502875 modified "2023-09-23" @default.
- W1987502875 title "SEM-EDX investigations of magnetron sputtered ZnO thin films" @default.
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- W1987502875 doi "https://doi.org/10.1109/icp.2011.6106835" @default.
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